The study of the dissolution and solubility kinetics of thin polymer films for resist materials

  • Jill Marie Buley

Student thesis: Doctoral ThesisPhD

Abstract

Date of Award1993
Original languageEnglish
Awarding Institution
  • University of Bath

Cite this

The study of the dissolution and solubility kinetics of thin polymer films for resist materials
Buley, J. M. (Author). 1993

Student thesis: Doctoral ThesisPhD