Synthesis and characterisation of single-source CVD precursors for M-N-Si composites

  • Samuel Cosham

Student thesis: Doctoral ThesisPhD

Abstract

Date of Award28 May 2010
Original languageEnglish
Awarding Institution
  • University of Bath
SupervisorKieran Molloy (Supervisor) & Andrew Johnson (Supervisor)

Keywords

  • chemical vapour deposition (CVD)
  • TiN
  • ternary metal nitrides

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