Numerical studies relating to vapour deposition in a furnace.

  • M. Diwan

Student thesis: Doctoral ThesisPhD


A numerical investigation, based on mathematical modelling of some important phenomena relating to the chemical vapour deposition (CVD) process in a furnace, has been undertaken. This thesis is concerned with investigating the furnace design which results in the maximum possible recovery of the material in the form of flat deposition flux profiles. A finite difference technique is used to solve the Navier-Stokes and the diffusion equations which arise from the CVD process. In Chapter One, the main ideas of the problem are introduced. The investigation of the rectangular duct furnace is discussed in Chapter Two, and the importance of the axial diffusion term is studied. Chapter Three deals with the Plane Parallel wall furnace and the effect of varying certain parameters (i.e. Re, Pe and a) on the deposition flux profiles and the percentage recovery of the material. In Chapter Four, we investigate the impingement jet furnace, while in Chapter Five we study several furnace designs including the cylindrical furnace, the Plane Parallel wall furnace with various outlet configurations and the angled wall furnace. Also the effects of surface kinetics are discussed. Chapter Six describes the multigrid method as a fast method to solve the Navier-Stokes and the diffusion equations.
Date of Award1982
Original languageEnglish
Awarding Institution
  • University of Bath

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