An investigation into the thin film deposition of binary oxide, ternary oxide and binary sulphide materials.

  • Prem Thongchai

Student thesis: Doctoral ThesisPhD

Abstract

Metal oxide and metal sulphide materials dominate a wide range of attractive properties and also to provide potential performances to various applications. There is a challenge to prepare these materials as a thin film with great quality and properties. Aerosol-assisted chemical vapour deposition (AACVD) is a promising technique to offer a desired thin film. The objective of this work is the preparation of the metal oxide and metal sulphide thin films via AACVD technique with single source precursor. The properties of deposited films were characterised.
Date of Award13 Feb 2019
LanguageEnglish
Awarding Institution
  • University of Bath
SupervisorAndrew Johnson (Supervisor) & Michael Hill (Supervisor)

Cite this

An investigation into the thin film deposition of binary oxide, ternary oxide and binary sulphide materials.
Thongchai, P. (Author). 13 Feb 2019

Student thesis: Doctoral ThesisPhD