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Zeolite-inspired low-k dielectrics overcoming limitations of zeolite films
S Eslava, J. Urrutia, A.N. Busaworv, M.R. Baklanov, F. Iacopi, S. Aldea, K. Maex, J.A. Martens, C.E.A. Kirschhock
Research output: Contribution to journal › Article › peer-review
39
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(SciVal)