Waveguide integrated GaN distributed Bragg reflector cavity using low-cost nanolithography

Simeng Jia, Emmanuel D. Le Boulbar, Krishna C. Balram, Jon R. Pugh, Tao Wang, Duncan W.E. Allsopp, Philip A. Shields, Martin J. Cryan

Research output: Contribution to journalArticle

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Abstract

This work presents the design, fabrication and measurement of gallium nitride (GaN) distributed Bragg reflector cavities integrated with input and output grating couplers. The devices are fabricated using a new, low-cost nanolithography technique: displacement Talbot lithography combined with direct laser writing lithography. The finite-difference time-domain method has been used to design all the components and measured and modelled results show good agreement. Such devices have applications in GaN integrated photonics and biosensing.

Original languageEnglish
Pages (from-to)1322-1327
Number of pages6
JournalMicro and Nano Letters
Volume14
Issue number13
DOIs
Publication statusPublished - 20 Nov 2019

ASJC Scopus subject areas

  • Bioengineering
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Jia, S., Le Boulbar, E. D., Balram, K. C., Pugh, J. R., Wang, T., Allsopp, D. W. E., ... Cryan, M. J. (2019). Waveguide integrated GaN distributed Bragg reflector cavity using low-cost nanolithography. Micro and Nano Letters, 14(13), 1322-1327. https://doi.org/10.1049/mnl.2019.0366

Waveguide integrated GaN distributed Bragg reflector cavity using low-cost nanolithography. / Jia, Simeng; Le Boulbar, Emmanuel D.; Balram, Krishna C.; Pugh, Jon R.; Wang, Tao; Allsopp, Duncan W.E.; Shields, Philip A.; Cryan, Martin J.

In: Micro and Nano Letters, Vol. 14, No. 13, 20.11.2019, p. 1322-1327.

Research output: Contribution to journalArticle

Jia, S, Le Boulbar, ED, Balram, KC, Pugh, JR, Wang, T, Allsopp, DWE, Shields, PA & Cryan, MJ 2019, 'Waveguide integrated GaN distributed Bragg reflector cavity using low-cost nanolithography', Micro and Nano Letters, vol. 14, no. 13, pp. 1322-1327. https://doi.org/10.1049/mnl.2019.0366
Jia S, Le Boulbar ED, Balram KC, Pugh JR, Wang T, Allsopp DWE et al. Waveguide integrated GaN distributed Bragg reflector cavity using low-cost nanolithography. Micro and Nano Letters. 2019 Nov 20;14(13):1322-1327. https://doi.org/10.1049/mnl.2019.0366
Jia, Simeng ; Le Boulbar, Emmanuel D. ; Balram, Krishna C. ; Pugh, Jon R. ; Wang, Tao ; Allsopp, Duncan W.E. ; Shields, Philip A. ; Cryan, Martin J. / Waveguide integrated GaN distributed Bragg reflector cavity using low-cost nanolithography. In: Micro and Nano Letters. 2019 ; Vol. 14, No. 13. pp. 1322-1327.
@article{83111dd226ae43d5a7e32522c9bec85f,
title = "Waveguide integrated GaN distributed Bragg reflector cavity using low-cost nanolithography",
abstract = "This work presents the design, fabrication and measurement of gallium nitride (GaN) distributed Bragg reflector cavities integrated with input and output grating couplers. The devices are fabricated using a new, low-cost nanolithography technique: displacement Talbot lithography combined with direct laser writing lithography. The finite-difference time-domain method has been used to design all the components and measured and modelled results show good agreement. Such devices have applications in GaN integrated photonics and biosensing.",
author = "Simeng Jia and {Le Boulbar}, {Emmanuel D.} and Balram, {Krishna C.} and Pugh, {Jon R.} and Tao Wang and Allsopp, {Duncan W.E.} and Shields, {Philip A.} and Cryan, {Martin J.}",
year = "2019",
month = "11",
day = "20",
doi = "10.1049/mnl.2019.0366",
language = "English",
volume = "14",
pages = "1322--1327",
journal = "Micro and Nano Letters",
issn = "1750-0443",
publisher = "Institution of Engineering and Technology",
number = "13",

}

TY - JOUR

T1 - Waveguide integrated GaN distributed Bragg reflector cavity using low-cost nanolithography

AU - Jia, Simeng

AU - Le Boulbar, Emmanuel D.

AU - Balram, Krishna C.

AU - Pugh, Jon R.

AU - Wang, Tao

AU - Allsopp, Duncan W.E.

AU - Shields, Philip A.

AU - Cryan, Martin J.

PY - 2019/11/20

Y1 - 2019/11/20

N2 - This work presents the design, fabrication and measurement of gallium nitride (GaN) distributed Bragg reflector cavities integrated with input and output grating couplers. The devices are fabricated using a new, low-cost nanolithography technique: displacement Talbot lithography combined with direct laser writing lithography. The finite-difference time-domain method has been used to design all the components and measured and modelled results show good agreement. Such devices have applications in GaN integrated photonics and biosensing.

AB - This work presents the design, fabrication and measurement of gallium nitride (GaN) distributed Bragg reflector cavities integrated with input and output grating couplers. The devices are fabricated using a new, low-cost nanolithography technique: displacement Talbot lithography combined with direct laser writing lithography. The finite-difference time-domain method has been used to design all the components and measured and modelled results show good agreement. Such devices have applications in GaN integrated photonics and biosensing.

UR - http://www.scopus.com/inward/record.url?scp=85074831930&partnerID=8YFLogxK

U2 - 10.1049/mnl.2019.0366

DO - 10.1049/mnl.2019.0366

M3 - Article

VL - 14

SP - 1322

EP - 1327

JO - Micro and Nano Letters

JF - Micro and Nano Letters

SN - 1750-0443

IS - 13

ER -