Wafer-scale graphene synthesis, transfer and FETs

Kenneth B.K. Teo; B. You; N. L. Rupesinghe; A. Newham; P E Greenwood; S. Buttress; Matthew Cole; L. Tao; J. Lee; D. Akinwande; K. Celebi; H. G. Park; J Sun

doi:10.1109/NANO.2013.6720922

Wafer-scale graphene synthesis, transfer and FETs

Kenneth B.K. Teo, B. You, N. L. Rupesinghe, A. Newham, P E Greenwood, S. Buttress, Matthew Cole, L. Tao, J. Lee, D. Akinwande, K. Celebi, H. G. Park, J Sun

Research output: Chapter or section in a book/report/conference proceeding › Chapter in a published conference proceeding

Abstract

Growth and characterization of graphene grown using copper foils as well as copper films on silicon dioxide on silicon substrates were performed. Kinetics of growth and effective activation energy for the graphene synthesis will be discussed for the surface catalytic synthesis of graphene. Conditions for large-scale synthesis of monolayer graphene will be addressed in this talk. Wafer-scale graphene transfer and electrical results will be presented. Based on our preliminary results from capped 100mm wafer scale graphene transistors, we expect a mobility of 4-6 k cm²/Vs with symmetry hole/electron transport. Key considerations and challenges for scaling are discussed and results for graphene growth on the 300mm wafer scale will be discussed.

Original language	English
Title of host publication	13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
Pages	1200-1203
Number of pages	4
DOIs	https://doi.org/10.1109/NANO.2013.6720922
Publication status	Published - 2013
Event	2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013 - Beijing, China Duration: 5 Aug 2013 → 8 Aug 2013

Conference

Conference	2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
Country/Territory	China
City	Beijing
Period	5/08/13 → 8/08/13

ASJC Scopus subject areas

Bioengineering
Electrical and Electronic Engineering
Materials Chemistry
Condensed Matter Physics

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10.1109/NANO.2013.6720922

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Teo, K. B. K., You, B., Rupesinghe, N. L., Newham, A., Greenwood, P. E., Buttress, S., Cole, M., Tao, L., Lee, J., Akinwande, D., Celebi, K., Park, H. G., & Sun, J. (2013). Wafer-scale graphene synthesis, transfer and FETs. In 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013 (pp. 1200-1203). Article 6720922 https://doi.org/10.1109/NANO.2013.6720922

Teo, KBK, You, B, Rupesinghe, NL, Newham, A, Greenwood, PE, Buttress, S, Cole, M, Tao, L, Lee, J, Akinwande, D, Celebi, K, Park, HG & Sun, J 2013, Wafer-scale graphene synthesis, transfer and FETs. in 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013., 6720922, pp. 1200-1203, 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013, Beijing, China, 5/08/13. https://doi.org/10.1109/NANO.2013.6720922

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title = "Wafer-scale graphene synthesis, transfer and FETs",

abstract = "Growth and characterization of graphene grown using copper foils as well as copper films on silicon dioxide on silicon substrates were performed. Kinetics of growth and effective activation energy for the graphene synthesis will be discussed for the surface catalytic synthesis of graphene. Conditions for large-scale synthesis of monolayer graphene will be addressed in this talk. Wafer-scale graphene transfer and electrical results will be presented. Based on our preliminary results from capped 100mm wafer scale graphene transistors, we expect a mobility of 4-6 k cm2/Vs with symmetry hole/electron transport. Key considerations and challenges for scaling are discussed and results for graphene growth on the 300mm wafer scale will be discussed. ",

author = "Teo, {Kenneth B.K.} and B. You and Rupesinghe, {N. L.} and A. Newham and Greenwood, {P E} and S. Buttress and Matthew Cole and L. Tao and J. Lee and D. Akinwande and K. Celebi and Park, {H. G.} and J Sun",

year = "2013",

doi = "10.1109/NANO.2013.6720922",

language = "English",

isbn = "9781479906758",

pages = "1200--1203",

booktitle = "13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013",

note = "2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013 ; Conference date: 05-08-2013 Through 08-08-2013",

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TY - GEN

T1 - Wafer-scale graphene synthesis, transfer and FETs

AU - Teo, Kenneth B.K.

AU - You, B.

AU - Rupesinghe, N. L.

AU - Newham, A.

AU - Greenwood, P E

AU - Buttress, S.

AU - Cole, Matthew

AU - Tao, L.

AU - Lee, J.

AU - Akinwande, D.

AU - Celebi, K.

AU - Park, H. G.

AU - Sun, J

PY - 2013

Y1 - 2013

N2 - Growth and characterization of graphene grown using copper foils as well as copper films on silicon dioxide on silicon substrates were performed. Kinetics of growth and effective activation energy for the graphene synthesis will be discussed for the surface catalytic synthesis of graphene. Conditions for large-scale synthesis of monolayer graphene will be addressed in this talk. Wafer-scale graphene transfer and electrical results will be presented. Based on our preliminary results from capped 100mm wafer scale graphene transistors, we expect a mobility of 4-6 k cm2/Vs with symmetry hole/electron transport. Key considerations and challenges for scaling are discussed and results for graphene growth on the 300mm wafer scale will be discussed.

AB - Growth and characterization of graphene grown using copper foils as well as copper films on silicon dioxide on silicon substrates were performed. Kinetics of growth and effective activation energy for the graphene synthesis will be discussed for the surface catalytic synthesis of graphene. Conditions for large-scale synthesis of monolayer graphene will be addressed in this talk. Wafer-scale graphene transfer and electrical results will be presented. Based on our preliminary results from capped 100mm wafer scale graphene transistors, we expect a mobility of 4-6 k cm2/Vs with symmetry hole/electron transport. Key considerations and challenges for scaling are discussed and results for graphene growth on the 300mm wafer scale will be discussed.

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U2 - 10.1109/NANO.2013.6720922

DO - 10.1109/NANO.2013.6720922

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AN - SCOPUS:84894134317

SN - 9781479906758

SP - 1200

EP - 1203

BT - 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013

T2 - 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013

Y2 - 5 August 2013 through 8 August 2013

ER -

Wafer-scale graphene synthesis, transfer and FETs

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