Vacancy-type defects in TiO2/SiO2/SiC dielectric stacks

P G Coleman, C P Burrows, R Mahapatra, N G Wright

Research output: Contribution to journal › Article › peer-review

Cite this

@article{d806852c16a447e1b0584c93b3824021,

title = "Vacancy-type defects in TiO2/SiO2/SiC dielectric stacks",

author = "Coleman, {P G} and Burrows, {C P} and R Mahapatra and Wright, {N G}",

note = "ID number: ISI:000248018300081",

year = "2007",

language = "English",

volume = "102",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

number = "1",

}