Useful vacancies: Positron beam interrogation of fluorine-vacancy complexes in semiconductor device structures

Paul Coleman, D Abdulmalik

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)71-74
Number of pages4
JournalApplied Surface Science
Volume255
Issue number1
DOIs
Publication statusPublished - 31 Oct 2008

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