Useful vacancies: Positron beam interrogation of fluorine-vacancy complexes in semiconductor device structures

Paul Coleman, D Abdulmalik

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title = "Useful vacancies: Positron beam interrogation of fluorine-vacancy complexes in semiconductor device structures",

author = "Paul Coleman and D Abdulmalik",

year = "2008",

month = oct,

day = "31",

doi = "10.1016/j.apsusc.2008.05.168",

language = "English",

volume = "255",

pages = "71--74",

journal = "Applied Surface Science",

publisher = "Elsevier",

number = "1",

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AU - Coleman, Paul

AU - Abdulmalik, D

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JO - Applied Surface Science

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