Abstract

Ultrasharp periodic AlN structures hold promise for applications such as the housing of site-controlled quantum dots and field emission structures. Etching could be an effective route to achieve this since it avoids the genera- tion of unwanted point defects resulting from dry etching or regrowth under unoptimised conditions. However, exploration of wet etching of AlN to create uniform arrays of periodic nanostructures has thus far been limited. In this paper, a combination of initial dry etching of a 2D AlN template followed by wet chemical etching is performed to reveal periodic arrays of nanostructures. A study of different initial dry etched structures and wet etching times were performed resulting in periodic arrays of ultrasharp AlN nanopyramids. It was discovered that potentially unconventional inclined facets were realised. A model to describe the dynamics of the wet etching on the dry etched nanostructures is also proposed.
Original languageEnglish
Article number112312
JournalMicroelectronic Engineering
Volume298
Early online date11 Jan 2025
DOIs
Publication statusE-pub ahead of print - 11 Jan 2025

Data Availability Statement

Data will be made available on request.

Acknowledgements

The authors would also like to acknowledge the David Bullet Nanofabrication facility where all the fabrication and SEM imaging was performed.

Funding

The authors would like to acknowledge financial support from the EPSRC, UK via Grant Nos. EP/M015181/1 & EP/M022862/1 “Manufacturing nano- engineered III-nitrides” and from the EPSRC Centre for Doctoral Training in Condensed Matter Physics (CDT-CMP), Grant No. EP/L015544/1.

Keywords

  • + w
  • 61.46
  • AlN
  • Combined dry and wet etching
  • Dry etching
  • Field emission devices
  • High temperature wet etching
  • Nanopyramids
  • Periodic AlN nanostructures

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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