Ultra high sensitivity in differential coupled micro/nano-resonator sensors

Ali Mohammadi, Bhaskar Choubey

Research output: Chapter or section in a book/report/conference proceedingChapter in a published conference proceeding

27 Downloads (Pure)

Abstract

The resonance frequencies (eigenvalues) and amplitudes (eigenvectors) of coupled micro/nano-resonator arrays are used in sensors to measure applied physical perturbations such as mass. A higher sensitivity is obtained by measuring amplitude changes rather than frequency variations corresponding to identical perturbations. In this paper we present a new technique by measuring the difference of displacement amplitudes of two resonators in perturbed and unperturbed conditions that can increase the sensitivity by several orders of magnitude compared with frequency/amplitude measurements. Two coupled resonators implemented in SOI technology are modeled in Coventor to provide a proof of concept for the proposed idea. In the example coupled resonator, differential sensitivity is increased by 570 times for the first mode and by 170 times for the second mode compared with absolute sensitivity.

Original languageEnglish
Title of host publication2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
PublisherIEEE
Pages652-656
Number of pages5
ISBN (Electronic)9781509030590
DOIs
Publication statusPublished - 29 Aug 2017
Event12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 - Los Angeles, USA United States
Duration: 9 Apr 201712 Apr 2017

Publication series

NameIEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
PublisherIEEE
Number12
Volume2017
ISSN (Electronic)2474-3755

Conference

Conference12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
Country/TerritoryUSA United States
CityLos Angeles
Period9/04/1712/04/17

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation

Fingerprint

Dive into the research topics of 'Ultra high sensitivity in differential coupled micro/nano-resonator sensors'. Together they form a unique fingerprint.

Cite this