Ultra high sensitivity in differential coupled micro/nano-resonator sensors

Ali Mohammadi; Bhaskar Choubey

doi:10.1109/NEMS.2017.8017106

Ultra high sensitivity in differential coupled micro/nano-resonator sensors

Department of Electronic & Electrical Engineering

University of Oxford

Research output: Chapter or section in a book/report/conference proceeding › Chapter in a published conference proceeding

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Abstract

The resonance frequencies (eigenvalues) and amplitudes (eigenvectors) of coupled micro/nano-resonator arrays are used in sensors to measure applied physical perturbations such as mass. A higher sensitivity is obtained by measuring amplitude changes rather than frequency variations corresponding to identical perturbations. In this paper we present a new technique by measuring the difference of displacement amplitudes of two resonators in perturbed and unperturbed conditions that can increase the sensitivity by several orders of magnitude compared with frequency/amplitude measurements. Two coupled resonators implemented in SOI technology are modeled in Coventor to provide a proof of concept for the proposed idea. In the example coupled resonator, differential sensitivity is increased by 570 times for the first mode and by 170 times for the second mode compared with absolute sensitivity.

Original language	English
Title of host publication	2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
Publisher	IEEE
Pages	652-656
Number of pages	5
ISBN (Electronic)	9781509030590
DOIs	https://doi.org/10.1109/NEMS.2017.8017106
Publication status	Published - 29 Aug 2017
Event	12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 - Los Angeles, USA United States Duration: 9 Apr 2017 → 12 Apr 2017

Publication series

Name	IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Publisher	IEEE
Number	12
Volume	2017
ISSN (Electronic)	2474-3755

Conference

Conference	12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
Country/Territory	USA United States
City	Los Angeles
Period	9/04/17 → 12/04/17

ASJC Scopus subject areas

Electrical and Electronic Engineering
Mechanical Engineering
Electronic, Optical and Magnetic Materials
Instrumentation

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10.1109/NEMS.2017.8017106

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Mohammadi, A., & Choubey, B. (2017). Ultra high sensitivity in differential coupled micro/nano-resonator sensors. In 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 (pp. 652-656). Article 8017106 (IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS); Vol. 2017, No. 12). IEEE. https://doi.org/10.1109/NEMS.2017.8017106

Ultra high sensitivity in differential coupled micro/nano-resonator sensors. / Mohammadi, Ali; Choubey, Bhaskar.
2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017. IEEE, 2017. p. 652-656 8017106 (IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS); Vol. 2017, No. 12).

Research output: Chapter or section in a book/report/conference proceeding › Chapter in a published conference proceeding

Mohammadi, A & Choubey, B 2017, Ultra high sensitivity in differential coupled micro/nano-resonator sensors. in 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017., 8017106, IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), no. 12, vol. 2017, IEEE, pp. 652-656, 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, USA United States, 9/04/17. https://doi.org/10.1109/NEMS.2017.8017106

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Ultra high sensitivity in differential coupled micro/nano-resonator sensors

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