Abstract
The resonance frequencies (eigenvalues) and amplitudes (eigenvectors) of coupled micro/nano-resonator arrays are used in sensors to measure applied physical perturbations such as mass. A higher sensitivity is obtained by measuring amplitude changes rather than frequency variations corresponding to identical perturbations. In this paper we present a new technique by measuring the difference of displacement amplitudes of two resonators in perturbed and unperturbed conditions that can increase the sensitivity by several orders of magnitude compared with frequency/amplitude measurements. Two coupled resonators implemented in SOI technology are modeled in Coventor to provide a proof of concept for the proposed idea. In the example coupled resonator, differential sensitivity is increased by 570 times for the first mode and by 170 times for the second mode compared with absolute sensitivity.
| Language | English |
|---|---|
| Title of host publication | 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 |
| Publisher | IEEE |
| Pages | 652-656 |
| Number of pages | 5 |
| ISBN (Electronic) | 9781509030590 |
| DOIs | |
| Status | Published - 25 Aug 2017 |
| Event | 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 - Los Angeles, USA United States Duration: 9 Apr 2017 → 12 Apr 2017 |
Conference
| Conference | 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 |
|---|---|
| Country | USA United States |
| City | Los Angeles |
| Period | 9/04/17 → 12/04/17 |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
- Electronic, Optical and Magnetic Materials
- Instrumentation
Cite this
Ultra high sensitivity in differential coupled micro/nano-resonator sensors. / Mohammadi, Ali; Choubey, Bhaskar.
2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017. IEEE, 2017. p. 652-656 8017106.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Ultra high sensitivity in differential coupled micro/nano-resonator sensors
AU - Mohammadi, Ali
AU - Choubey, Bhaskar
PY - 2017/8/25
Y1 - 2017/8/25
N2 - The resonance frequencies (eigenvalues) and amplitudes (eigenvectors) of coupled micro/nano-resonator arrays are used in sensors to measure applied physical perturbations such as mass. A higher sensitivity is obtained by measuring amplitude changes rather than frequency variations corresponding to identical perturbations. In this paper we present a new technique by measuring the difference of displacement amplitudes of two resonators in perturbed and unperturbed conditions that can increase the sensitivity by several orders of magnitude compared with frequency/amplitude measurements. Two coupled resonators implemented in SOI technology are modeled in Coventor to provide a proof of concept for the proposed idea. In the example coupled resonator, differential sensitivity is increased by 570 times for the first mode and by 170 times for the second mode compared with absolute sensitivity.
AB - The resonance frequencies (eigenvalues) and amplitudes (eigenvectors) of coupled micro/nano-resonator arrays are used in sensors to measure applied physical perturbations such as mass. A higher sensitivity is obtained by measuring amplitude changes rather than frequency variations corresponding to identical perturbations. In this paper we present a new technique by measuring the difference of displacement amplitudes of two resonators in perturbed and unperturbed conditions that can increase the sensitivity by several orders of magnitude compared with frequency/amplitude measurements. Two coupled resonators implemented in SOI technology are modeled in Coventor to provide a proof of concept for the proposed idea. In the example coupled resonator, differential sensitivity is increased by 570 times for the first mode and by 170 times for the second mode compared with absolute sensitivity.
UR - http://www.scopus.com/inward/record.url?scp=85030871449&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2017.8017106
DO - 10.1109/NEMS.2017.8017106
M3 - Conference contribution
SP - 652
EP - 656
BT - 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
PB - IEEE
ER -