Ultra high sensitivity in differential coupled micro/nano-resonator sensors

Ali Mohammadi, Bhaskar Choubey

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The resonance frequencies (eigenvalues) and amplitudes (eigenvectors) of coupled micro/nano-resonator arrays are used in sensors to measure applied physical perturbations such as mass. A higher sensitivity is obtained by measuring amplitude changes rather than frequency variations corresponding to identical perturbations. In this paper we present a new technique by measuring the difference of displacement amplitudes of two resonators in perturbed and unperturbed conditions that can increase the sensitivity by several orders of magnitude compared with frequency/amplitude measurements. Two coupled resonators implemented in SOI technology are modeled in Coventor to provide a proof of concept for the proposed idea. In the example coupled resonator, differential sensitivity is increased by 570 times for the first mode and by 170 times for the second mode compared with absolute sensitivity.

LanguageEnglish
Title of host publication2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
PublisherIEEE
Pages652-656
Number of pages5
ISBN (Electronic)9781509030590
DOIs
StatusPublished - 25 Aug 2017
Event12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 - Los Angeles, USA United States
Duration: 9 Apr 201712 Apr 2017

Conference

Conference12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
CountryUSA United States
CityLos Angeles
Period9/04/1712/04/17

Fingerprint

Resonators
resonators
sensitivity
sensors
Sensors
perturbation
SOI (semiconductors)
Eigenvalues and eigenfunctions
eigenvectors
eigenvalues

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation

Cite this

Mohammadi, A., & Choubey, B. (2017). Ultra high sensitivity in differential coupled micro/nano-resonator sensors. In 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 (pp. 652-656). [8017106] IEEE. https://doi.org/10.1109/NEMS.2017.8017106

Ultra high sensitivity in differential coupled micro/nano-resonator sensors. / Mohammadi, Ali; Choubey, Bhaskar.

2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017. IEEE, 2017. p. 652-656 8017106.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mohammadi, A & Choubey, B 2017, Ultra high sensitivity in differential coupled micro/nano-resonator sensors. in 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017., 8017106, IEEE, pp. 652-656, 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, USA United States, 9/04/17. https://doi.org/10.1109/NEMS.2017.8017106
Mohammadi A, Choubey B. Ultra high sensitivity in differential coupled micro/nano-resonator sensors. In 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017. IEEE. 2017. p. 652-656. 8017106 https://doi.org/10.1109/NEMS.2017.8017106
Mohammadi, Ali ; Choubey, Bhaskar. / Ultra high sensitivity in differential coupled micro/nano-resonator sensors. 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017. IEEE, 2017. pp. 652-656
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