Abstract
Low frequency drain current fluctuation noise was measured in two types of polysilicon double gate thin film transistors fabricated by sequential lateral solidification technique keeping the back gate grounded. In X-oriented devices, the grain boundaries are parallel to the drain current flow, while in Y-oriented devices the grain boundaries are lying perpendicular to the drain current flow. The noise spectra consist of generation-recombination (g-r) and flicker noise components. In X-oriented TFTs the g-r centers are related to bulk traps located in the grains, whereas in Y-oriented TFTs the g-r centers correspond to grain boundary traps in addition to bulk traps in the grains.
Original language | English |
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Title of host publication | Proceedings of the 28th International Conference on Microelectronics (MIEL), 2012 |
Publisher | IEEE |
Pages | 339-342 |
Number of pages | 4 |
ISBN (Print) | 9781467302371 |
DOIs | |
Publication status | Published - 2012 |
Event | 2012 28th International Conference on Microelectronics, MIEL 2012 - Nis, Serbia Duration: 13 May 2012 → 16 May 2012 |
Conference
Conference | 2012 28th International Conference on Microelectronics, MIEL 2012 |
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Country/Territory | Serbia |
City | Nis |
Period | 13/05/12 → 16/05/12 |