Time Series Anomaly Detection in Batch Semiconductor Processes using Localised Reconstruction Errors from Semi-Supervised Convolutional AutoEncoders deployed as a Containerised Microservices Edge Solution

Mark Gorman; Damien Coyle; Xuemei Ding; Liam Maguire; Chao Feng

Time Series Anomaly Detection in Batch Semiconductor Processes using Localised Reconstruction Errors from Semi-Supervised Convolutional AutoEncoders deployed as a Containerised Microservices Edge Solution

Mark Gorman, Damien Coyle, Xuemei Ding, Liam Maguire, Chao Feng

Research output: Chapter or section in a book/report/conference proceeding › Chapter in a published conference proceeding

Original language	English
Title of host publication	20th European Advanced Process Control and Manufacturing Conference
Edition	20th
Publication status	Published - 5 Apr 2021
Event	20th European advanced process control and manufacturing (apc\|m) Conference - Toulon, France Duration: 30 Mar 2020 → 1 Apr 2020

Conference

Conference	20th European advanced process control and manufacturing (apc\|m) Conference
Country/Territory	France
City	Toulon
Period	30/03/20 → 1/04/20

Keywords

Deep learning
Autoencoder
Time Series
Semiconductor
Manufacturing
Reconstruction Error

Access to Document

https://pure.ulster.ac.uk/en/publications/time-series-anomaly-detection-in-batch-semiconductor-processes-us

Cite this

Gorman, M., Coyle, D., Ding, X., Maguire, L., & Feng, C. (2021). Time Series Anomaly Detection in Batch Semiconductor Processes using Localised Reconstruction Errors from Semi-Supervised Convolutional AutoEncoders deployed as a Containerised Microservices Edge Solution. In 20th European Advanced Process Control and Manufacturing Conference (20th ed.) https://pure.ulster.ac.uk/en/publications/time-series-anomaly-detection-in-batch-semiconductor-processes-us

Time Series Anomaly Detection in Batch Semiconductor Processes using Localised Reconstruction Errors from Semi-Supervised Convolutional AutoEncoders deployed as a Containerised Microservices Edge Solution. / Gorman, Mark; Coyle, Damien; Ding, Xuemei et al.
20th European Advanced Process Control and Manufacturing Conference. 20th. ed. 2021.

Research output: Chapter or section in a book/report/conference proceeding › Chapter in a published conference proceeding

Gorman, M, Coyle, D, Ding, X, Maguire, L & Feng, C 2021, Time Series Anomaly Detection in Batch Semiconductor Processes using Localised Reconstruction Errors from Semi-Supervised Convolutional AutoEncoders deployed as a Containerised Microservices Edge Solution. in 20th European Advanced Process Control and Manufacturing Conference. 20th edn, 20th European advanced process control and manufacturing (apc|m) Conference, Toulon, France, 30/03/20. <https://pure.ulster.ac.uk/en/publications/time-series-anomaly-detection-in-batch-semiconductor-processes-us>

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