Tilted beam piezoresistive displacement sensor: design, modeling and characterization

Mohammad Maroufi, Ali Bazaei, Ali Mohammadi, S. O. Reza Moheimani

Research output: Contribution to journalArticlepeer-review

21 Citations (SciVal)


We present a comprehensive study of the design, modeling, and characterization of an on-chip piezoresistive displacement sensor. The design is based on the bulk piezoresistivity of tilted clamped-guided beams without the need for additional steps to generate doped regions. The sensor is implemented in a one-degree-of-freedom microelectromechanical system (MEMS) nanopositioner, where the beams also function as the suspension system. A standard MEMS fabrication process is used to realize the device on single-crystalline silicon as the structural material. The beams are oppositely tilted to develop tensile and compressive axial forces during stage movement, creating a differential sensing feature. An analytical approach is proposed for modeling and design of the tilted clamped-guided beams. The linearity of the sensor in the differential configuration is investigated analytically. The static, dynamic, and noise characteristics of the sensor are presented, followed by a model-based investigation of the measured dynamic feedthrough.
Original languageEnglish
Article number5
Pages (from-to)1594-1605
Number of pages12
JournalJournal of Microelectromechanical Systems
Issue number5
Early online date18 May 2015
Publication statusPublished - 31 Oct 2015


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