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Abstract
The dissolution rate of porous silicon layers was measured in-situ during etching by HF and NaOH solutions. Cellular models were applied to the structure of the pSi from which the expected rates of change of porosity with time were calculated. Experimental results indicate that the nanostructure of porous silicon may be best modeled as an open-cell foam. This is in contrast to the honeycomb model often used which is not supported by the experimental data.
Original language | English |
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Title of host publication | In-Situ Studies Across Spatial and Temporal Scales for Nanoscience and Technology |
Place of Publication | Warrendale |
Publisher | Materials Research Society |
Pages | 171-176 |
Number of pages | 6 |
Volume | 1146 |
ISBN (Print) | 9781615677726 |
Publication status | Published - 2008 |
Event | 2008 MRS Fall Meeting, December 1, 2008 - December 5, 2008 - Boston, MA, USA United States Duration: 1 Dec 2008 → … |
Publication series
Name | Materials Research Society Symposium Proceedings |
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Publisher | Materials Research Society |
Conference
Conference | 2008 MRS Fall Meeting, December 1, 2008 - December 5, 2008 |
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Country/Territory | USA United States |
City | Boston, MA |
Period | 1/12/08 → … |
Keywords
- nano-porous silicon
- honeycomb models
- NaOH solutions
- porous silicon layers
- in-situ
- time resolved measurement
- dissolution rates
- experimental data
- cellular model
- open-cell foams
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Dive into the research topics of 'The morphology of nanoporous silicon investigated by time-resolved measurement of changes to the porosity during dissolution'. Together they form a unique fingerprint.Projects
- 1 Finished
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SOUND-LIGHT INTERACTIONS IN SPATIALLY PERIOD NANOPOROUS SILI CON STRUCTURES
Snow, P. (PI), Birks, T. (CoI) & Russell, P. S. (CoI)
Engineering and Physical Sciences Research Council
5/09/05 → 4/02/10
Project: Research council