The morphology of nanoporous silicon investigated by time-resolved measurement of changes to the porosity during dissolution

Bernhard Goller, Gazi N Aliev, Dmitry Kovalev, Paul A Snow

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

The dissolution rate of porous silicon layers was measured in-situ during etching by HF and NaOH solutions. Cellular models were applied to the structure of the pSi from which the expected rates of change of porosity with time were calculated. Experimental results indicate that the nanostructure of porous silicon may be best modeled as an open-cell foam. This is in contrast to the honeycomb model often used which is not supported by the experimental data.
Original languageEnglish
Title of host publicationIn-Situ Studies Across Spatial and Temporal Scales for Nanoscience and Technology
Place of PublicationWarrendale
PublisherMaterials Research Society
Pages171-176
Number of pages6
Volume1146
ISBN (Print)9781615677726
Publication statusPublished - 2008
Event2008 MRS Fall Meeting, December 1, 2008 - December 5, 2008 - Boston, MA, USA United States
Duration: 1 Dec 2008 → …

Publication series

NameMaterials Research Society Symposium Proceedings
PublisherMaterials Research Society

Conference

Conference2008 MRS Fall Meeting, December 1, 2008 - December 5, 2008
Country/TerritoryUSA United States
CityBoston, MA
Period1/12/08 → …

Keywords

  • nano-porous silicon
  • honeycomb models
  • NaOH solutions
  • porous silicon layers
  • in-situ
  • time resolved measurement
  • dissolution rates
  • experimental data
  • cellular model
  • open-cell foams

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