The impact of positioning error in Double Displacement Talbot Lithography

Pengfei Fan; Ramee Fahmy; Ben Green; Philip Shields

doi:10.1364/OE.558292

The impact of positioning error in Double Displacement Talbot Lithography

Pengfei Fan, Ramee Fahmy, Ben Green, Philip Shields

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	29912-29926
Journal	Optics Express
Volume	33
Issue number	14
Early online date	8 Jul 2025
DOIs	https://doi.org/10.1364/OE.558292
Publication status	Published - 8 Jul 2025

Bibliographical note

Publishing OA

Data Availability Statement

All data created during this research is openly available from the University of Bath Research Data Archive at [31].

31. P. Fan, R. Fahmy, B. Green, et al., “Data repository for supplementary materials,” University of Bath (2025), https://doi.org/10.15125/BATH-01552.

Access to Document

10.1364/OE.558292Licence: CC BY

Cite this

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author = "Pengfei Fan and Ramee Fahmy and Ben Green and Philip Shields",

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AU - Shields, Philip

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The impact of positioning error in Double Displacement Talbot Lithography

Bibliographical note

Data Availability Statement

Access to Document

Other files and links

Displacement Talbot Lithography: accelerating a versatile and low-cost patterning technique for precision manufacturing

Cite this

The impact of positioning error in Double Displacement Talbot Lithography

Bibliographical note

Data Availability Statement

Access to Document

Other files and links

Projects

Displacement Talbot Lithography: accelerating a versatile and low-cost patterning technique for precision manufacturing

Cite this