The formation, migration, agglomeration and annealing of vacancy-type defects in self-implanted Si

P G Coleman, R E Harding, G Davies, J Tan, J Wong-Leung

Research output: Contribution to journalArticle

7 Citations (Scopus)
Original languageEnglish
Pages (from-to)695-700
Number of pages6
JournalJournal of Materials Science-Materials in Electronics
Volume18
Issue number7
Publication statusPublished - 2007

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