Fingerprint Dive into the research topics of 'TEM investigation on top Si layer and buried oxide layer in silicon wafer implanted with low dose at low energy'. Together they form a unique fingerprint.
- Sort by
- Weight
- Alphabetically
TEM investigation on top Si layer and buried oxide layer in silicon wafer implanted with low dose at low energy
A. Jaroenworaluck, P. Sarmphim, S. Muensit, R. Stevens
Research output: Contribution to journal › Article
1
Citation
(Scopus)