TEM investigation on top Si layer and buried oxide layer in silicon wafer implanted with low dose at low energy

A. Jaroenworaluck, P. Sarmphim, S. Muensit, R. Stevens

Research output: Contribution to journalArticlepeer-review

1 Citation (SciVal)

Fingerprint

Dive into the research topics of 'TEM investigation on top Si layer and buried oxide layer in silicon wafer implanted with low dose at low energy'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds