Abstract
The structure of GaSb layers grown on (111) GaAs substrate were studied using x-ray diffraction. The GaSb layers were grown by metal-organic vapor phase epitaxy, with thicknesses of 70 Å, 160 Å and 1260 Å. The lattice mismatch between the layer and the substrate was large and most of the misfit strain was taken up by a regular network of dislocations localized at the interfaces between GaSb and GaAs. The result shows that the structure of GaAs substrate was a single fcc domain.
Original language | English |
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Pages (from-to) | 3012-3019 |
Number of pages | 8 |
Journal | Journal of Applied Physics |
Volume | 96 |
Issue number | 5 |
DOIs | |
Publication status | Published - 2004 |