Slow positron implantation spectroscopy - a tool to characterize vacancy-type damage in ion-implanted 6H-SiC

G Brauer, W Anwand, P G Coleman, W Skorupa

Research output: Contribution to journalArticle

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)131-136
Number of pages6
JournalVacuum
Volume78
Issue number2-4
Publication statusPublished - 2005

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