Single-source CVD routes to titanium phosphide

C S Blackman, C J Carmalt, I P Parkin, L Apostolico, K C Molloy, A J P White, D J Williams

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20 Citations (SciVal)


Treatment of TiCl4 with two equivalents of L (L = PhPH2, Ph2PH, PPh3, CyPH2, Cy2PH, PCy3) resulted in the formation of [TiCl4(L)(2)]. Reaction of TiCl4 with a stoichiometric amount of 1,2-bis(diphenylphosphino)methane (dppm), 1,2-bis(diphenylphosphino)ethane (dppe) and 1,2-bis(diphenylphosphino) propane (dppp) affords [TiCl4(dppm)], [TiCl4(dppe)] and [TiCl4(dppp)], respectively. X-Ray crystal structures of [TiCl4(Cy2PH)(2)] (5) and [TiCl4(dppe)] (9) have been determined. Low pressure chemical vapour deposition (LPCVD) studies of all the compounds revealed that [TiCl4(L)(2)] (L = CyPH2, Cy2PH and PCy3) and [TiCl4(dppm)] can form titanium phosphide thin-films on glass.
Original languageEnglish
Pages (from-to)2702-2709
Number of pages8
JournalJournal of the Chemical Society: Dalton Transactions
Issue number13
Publication statusPublished - 2002


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