Single-source CVD routes to titanium phosphide

C S Blackman; C J Carmalt; I P Parkin; L Apostolico; K C Molloy; A J P White; D J Williams

doi:10.1039/b203613b

Single-source CVD routes to titanium phosphide

C S Blackman, C J Carmalt, I P Parkin, L Apostolico, K C Molloy, A J P White, D J Williams

Department of Chemistry

Research output: Contribution to journal › Article › peer-review

22 Citations (SciVal)

Abstract

Treatment of TiCl4 with two equivalents of L (L = PhPH2, Ph2PH, PPh3, CyPH2, Cy2PH, PCy3) resulted in the formation of [TiCl4(L)(2)]. Reaction of TiCl4 with a stoichiometric amount of 1,2-bis(diphenylphosphino)methane (dppm), 1,2-bis(diphenylphosphino)ethane (dppe) and 1,2-bis(diphenylphosphino) propane (dppp) affords [TiCl4(dppm)], [TiCl4(dppe)] and [TiCl4(dppp)], respectively. X-Ray crystal structures of [TiCl4(Cy2PH)(2)] (5) and [TiCl4(dppe)] (9) have been determined. Low pressure chemical vapour deposition (LPCVD) studies of all the compounds revealed that [TiCl4(L)(2)] (L = CyPH2, Cy2PH and PCy3) and [TiCl4(dppm)] can form titanium phosphide thin-films on glass.

Original language	English
Pages (from-to)	2702-2709
Number of pages	8
Journal	Journal of the Chemical Society: Dalton Transactions
Issue number	13
DOIs	https://doi.org/10.1039/b203613b
Publication status	Published - 2002

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ID number: ISI:000176467300020

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10.1039/b203613b

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@article{f1b315b59a904ebfbd775bf9733040d4,

title = "Single-source CVD routes to titanium phosphide",

abstract = "Treatment of TiCl4 with two equivalents of L (L = PhPH2, Ph2PH, PPh3, CyPH2, Cy2PH, PCy3) resulted in the formation of [TiCl4(L)(2)]. Reaction of TiCl4 with a stoichiometric amount of 1,2-bis(diphenylphosphino)methane (dppm), 1,2-bis(diphenylphosphino)ethane (dppe) and 1,2-bis(diphenylphosphino) propane (dppp) affords [TiCl4(dppm)], [TiCl4(dppe)] and [TiCl4(dppp)], respectively. X-Ray crystal structures of [TiCl4(Cy2PH)(2)] (5) and [TiCl4(dppe)] (9) have been determined. Low pressure chemical vapour deposition (LPCVD) studies of all the compounds revealed that [TiCl4(L)(2)] (L = CyPH2, Cy2PH and PCy3) and [TiCl4(dppm)] can form titanium phosphide thin-films on glass.",

author = "Blackman, {C S} and Carmalt, {C J} and Parkin, {I P} and L Apostolico and Molloy, {K C} and White, {A J P} and Williams, {D J}",

note = "ID number: ISI:000176467300020",

year = "2002",

doi = "10.1039/b203613b",

language = "English",

pages = "2702--2709",

journal = "Journal of the Chemical Society: Dalton Transactions",

issn = "1472-7773",

publisher = "Royal Society of Chemistry",

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TY - JOUR

T1 - Single-source CVD routes to titanium phosphide

AU - Blackman, C S

AU - Carmalt, C J

AU - Parkin, I P

AU - Apostolico, L

AU - Molloy, K C

AU - White, A J P

AU - Williams, D J

N1 - ID number: ISI:000176467300020

PY - 2002

Y1 - 2002

N2 - Treatment of TiCl4 with two equivalents of L (L = PhPH2, Ph2PH, PPh3, CyPH2, Cy2PH, PCy3) resulted in the formation of [TiCl4(L)(2)]. Reaction of TiCl4 with a stoichiometric amount of 1,2-bis(diphenylphosphino)methane (dppm), 1,2-bis(diphenylphosphino)ethane (dppe) and 1,2-bis(diphenylphosphino) propane (dppp) affords [TiCl4(dppm)], [TiCl4(dppe)] and [TiCl4(dppp)], respectively. X-Ray crystal structures of [TiCl4(Cy2PH)(2)] (5) and [TiCl4(dppe)] (9) have been determined. Low pressure chemical vapour deposition (LPCVD) studies of all the compounds revealed that [TiCl4(L)(2)] (L = CyPH2, Cy2PH and PCy3) and [TiCl4(dppm)] can form titanium phosphide thin-films on glass.

AB - Treatment of TiCl4 with two equivalents of L (L = PhPH2, Ph2PH, PPh3, CyPH2, Cy2PH, PCy3) resulted in the formation of [TiCl4(L)(2)]. Reaction of TiCl4 with a stoichiometric amount of 1,2-bis(diphenylphosphino)methane (dppm), 1,2-bis(diphenylphosphino)ethane (dppe) and 1,2-bis(diphenylphosphino) propane (dppp) affords [TiCl4(dppm)], [TiCl4(dppe)] and [TiCl4(dppp)], respectively. X-Ray crystal structures of [TiCl4(Cy2PH)(2)] (5) and [TiCl4(dppe)] (9) have been determined. Low pressure chemical vapour deposition (LPCVD) studies of all the compounds revealed that [TiCl4(L)(2)] (L = CyPH2, Cy2PH and PCy3) and [TiCl4(dppm)] can form titanium phosphide thin-films on glass.

U2 - 10.1039/b203613b

DO - 10.1039/b203613b

M3 - Article

SN - 1472-7773

SP - 2702

EP - 2709

JO - Journal of the Chemical Society: Dalton Transactions

JF - Journal of the Chemical Society: Dalton Transactions

IS - 13

ER -

Single-source CVD routes to titanium phosphide

Abstract

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