Single-source AACVD of composite cobalt-silicon oxide thin films

M.S. Hill, A.L. Johnson, T.D. Manning, K.C. Molloy, B.J. Wickham

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

A series of cobalt(II) complexes comprising either triorganosiloxide or tris(tert-butoxy)siloxide ligands have been synthesized and characterized. A mononuclear constitution is enforced through the incorporation of bi- and tridentate N-donor ligands. The resultant 4- or 6-coordinate complexes have been identified by single-crystal X-ray diffraction analysis and have been assessed for their potential as molecular precursors to hybrid cobalt/silicon oxide thin film materials by thermogravimetric analysis. A TMEDA adduct of the bis-ligated Co(II) tris(tert-butoxy)siloxide species has been utilized as a single-source precursor for the AACVD of aesthetically attractive blue composite films. Analysis by PXRD, SEM, EDS and XPS indicated the production of amorphous, continuous films with the bulk compositions reflecting the cobalt, silicon and oxygen stoichiometry of the molecular precursor complex.
LanguageEnglish
Pages47-56
Number of pages10
JournalInorganica Chimica Acta
Volume422
Early online date27 Jul 2014
DOIs
StatusPublished - 1 Oct 2014

Fingerprint

cobalt oxides
Silicon oxides
Cobalt
silicon oxides
Oxide films
cobalt
Thin films
ligands
composite materials
constitution
Composite materials
thin films
Ligands
adducts
stoichiometry
Composite films
Silicon
Stoichiometry
X ray diffraction analysis
scanning electron microscopy

Keywords

  • AACVD
  • Aerosol-assisted chemical vapour
  • Cobalt
  • deposition
  • Siloxide
  • Single-source

Cite this

Single-source AACVD of composite cobalt-silicon oxide thin films. / Hill, M.S.; Johnson, A.L.; Manning, T.D.; Molloy, K.C.; Wickham, B.J.

In: Inorganica Chimica Acta, Vol. 422, 01.10.2014, p. 47-56.

Research output: Contribution to journalArticle

Hill, M.S. ; Johnson, A.L. ; Manning, T.D. ; Molloy, K.C. ; Wickham, B.J. / Single-source AACVD of composite cobalt-silicon oxide thin films. In: Inorganica Chimica Acta. 2014 ; Vol. 422. pp. 47-56.
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