Si passivation for Ge pMOSFETs: Impact of Si cap growth conditions

B. Vincent, R. Loo, W. Vandervorst, J. Delmotte, B. Douhard, V. K. Valev, M. Vanbel, T. Verbiest, J. Rip, B. Brijs, T. Conard, C. Claypool, S. Takeuchi, S. Zaima, J. Mitard, B. De Jaeger, J. Dekoster, M. Caymax

Research output: Contribution to journal › Article › peer-review

32 Citations (SciVal)

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