Sensing bandwidth of electrothermal MEMS transducers in constant voltage and current modes

Ali Bazaei, Ali Mohammadi, S. O. Reza Moheimani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper addresses effects of constant voltage and current biasing methods on sensing bandwidth of electrothermal displacement sensors in micro-electromechanical systems (MEMS). The dynamic response of the sensor is modeled based on first principles. The obtained model successfully captures a variety of nonlinear phenomena. Experiments are conducted to confirm the validity of the model and simulation results.

Original languageEnglish
Title of host publicationAIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics
PublisherIEEE
Pages1464-1468
Number of pages5
ISBN (Print)9781479957361
DOIs
Publication statusPublished - 14 Aug 2014
Event2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014 - Besancon, France
Duration: 8 Jul 201411 Jul 2014

Publication series

NameInternational Conference on Advanced Intelligent Mechatronics
PublisherIEEE/ASME
ISSN (Print)2159-6247
ISSN (Electronic)2159-6255

Conference

Conference2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014
CountryFrance
CityBesancon
Period8/07/1411/07/14

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Software
  • Computer Science Applications
  • Electrical and Electronic Engineering

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