Sensing bandwidth of electrothermal MEMS transducers in constant voltage and current modes

Ali Bazaei; Ali Mohammadi; S. O. Reza Moheimani

doi:10.1109/AIM.2014.6878289

Sensing bandwidth of electrothermal MEMS transducers in constant voltage and current modes

Ali Bazaei, Ali Mohammadi, S. O. Reza Moheimani

Department of Electronic & Electrical Engineering

The University of Newcastle, Australia

Research output: Chapter or section in a book/report/conference proceeding › Chapter in a published conference proceeding

1 Citation (SciVal)

Abstract

This paper addresses effects of constant voltage and current biasing methods on sensing bandwidth of electrothermal displacement sensors in micro-electromechanical systems (MEMS). The dynamic response of the sensor is modeled based on first principles. The obtained model successfully captures a variety of nonlinear phenomena. Experiments are conducted to confirm the validity of the model and simulation results.

Original language	English
Title of host publication	AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics
Publisher	IEEE
Pages	1464-1468
Number of pages	5
ISBN (Print)	9781479957361
DOIs	https://doi.org/10.1109/AIM.2014.6878289
Publication status	Published - 14 Aug 2014
Event	2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014 - Besancon, France Duration: 8 Jul 2014 → 11 Jul 2014

Publication series

Name	International Conference on Advanced Intelligent Mechatronics
Publisher	IEEE/ASME
ISSN (Print)	2159-6247
ISSN (Electronic)	2159-6255

Conference

Conference	2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014
Country/Territory	France
City	Besancon
Period	8/07/14 → 11/07/14

ASJC Scopus subject areas

Control and Systems Engineering
Software
Computer Science Applications
Electrical and Electronic Engineering

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10.1109/AIM.2014.6878289

Cite this

Bazaei, A., Mohammadi, A., & Moheimani, S. O. R. (2014). Sensing bandwidth of electrothermal MEMS transducers in constant voltage and current modes. In AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics (pp. 1464-1468). Article 6878289 (International Conference on Advanced Intelligent Mechatronics). IEEE. https://doi.org/10.1109/AIM.2014.6878289

Sensing bandwidth of electrothermal MEMS transducers in constant voltage and current modes. / Bazaei, Ali; Mohammadi, Ali; Moheimani, S. O. Reza.
AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics. IEEE, 2014. p. 1464-1468 6878289 (International Conference on Advanced Intelligent Mechatronics).

Research output: Chapter or section in a book/report/conference proceeding › Chapter in a published conference proceeding

Bazaei, A, Mohammadi, A & Moheimani, SOR 2014, Sensing bandwidth of electrothermal MEMS transducers in constant voltage and current modes. in AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics., 6878289, International Conference on Advanced Intelligent Mechatronics, IEEE, pp. 1464-1468, 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014, Besancon, France, 8/07/14. https://doi.org/10.1109/AIM.2014.6878289

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AB - This paper addresses effects of constant voltage and current biasing methods on sensing bandwidth of electrothermal displacement sensors in micro-electromechanical systems (MEMS). The dynamic response of the sensor is modeled based on first principles. The obtained model successfully captures a variety of nonlinear phenomena. Experiments are conducted to confirm the validity of the model and simulation results.

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Sensing bandwidth of electrothermal MEMS transducers in constant voltage and current modes

Abstract

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ASJC Scopus subject areas

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