Self-implantation of Cz-Si: Clustering and annealing of defects

D A Abdulmalik, P G Coleman, I Y Al-Qaradawi

Research output: Contribution to journalArticlepeer-review

8 Citations (SciVal)
Original languageEnglish
Pages (from-to)3209-3214
Number of pages6
JournalApplied Surface Science
Volume252
Issue number9
Publication statusPublished - 2006

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