Selective Area Growth of GaAs Nanowires and Microplatelet Arrays on Silicon by Hydride Vapor-Phase Epitaxy

Mohammed Zeghouane, Gabin Grégoire, Emmanuel Chereau, Geoffrey Avit, Philipp Staudinger, Kirsten E. Moselund, Heinz Schmid, Pierre Marie Coulon, Philip Shields, Nebile Isik Goktas, Ray R. LaPierre, Agnès Trassoudaine, Yamina André, Evelyne Gil

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In this work, we demonstrate the growth of vertically oriented GaAs nanowires (NWs) and microplatelets directly on a patterned SiO2/Si(111) substrate by hydride vapor-phase epitaxy (HVPE). Direct condensation of GaAs on Si was achieved through a critical surface preparation under an As-controlled atmosphere. GaAs NWs were grown along the ⟨111⟩B direction with a hexagonal cross section when the hole opening diameter (D) in the SiO2 mask was below 350 nm. Larger apertures (D ≥ 500 nm) resulted in uniform microplatelets. This study highlights the capability of HVPE for selective area growth of GaAs directly on Si and thus the potential of HVPE as a generic heterointegration process for III-V semiconductors on silicon.

Original languageEnglish
Pages (from-to)2120-2127
Number of pages8
JournalCrystal Growth and Design
Issue number4
Early online date21 Mar 2023
Publication statusPublished - 5 Apr 2023

Bibliographical note

Funding Information:
The research leading to these results has received funding from the European Research Council under grant agreement N° ENUF 790448. This work has also been financially supported by the CPER MMASYF of Region Auvergne-Rhone Alpes, which the authors acknowledge gratefully. It was also funded by: Région Auvergne Rhône-Alpes. Pack ambition recherche; Convention n°17 011236 01-61617; and Région Auvergne Rhône-Alpes. Pack ambition recherche international DRV_PIP_2021-252_IP_NANOSPRING, the program “Investissements d’avenir” of the French ANR agency, the French government IDEX-SITE initiative 16-μIDEX-0001 (CAP20-25); the European Commission (Auvergne FEDER Funds), and the Region Auvergne in the framework of the LabExIMobS3 (ANR-10-LABX-16-01) and CPER. Electron microscopy was performed at the Canadian Centre for Electron Microscopy and supported by the Natural Sciences and Engineering Research Council of Canada.

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics


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