Scanning electron microscope as a flexible tool for investigating the properties of UV-emitting nitride semiconductor thin films

C. Trager-Cowan; A. Alasmari; W. Avis; J. Bruckbauer; P. R. Edwards; B. Hourahine; S. Kraeusel; G. Kusch; R. Johnston; G. Naresh-Kumar; R. W. Martin; M. Nouf-Allehiani; E. Pascal; L. Spasevski; David Thomson; S. Vespucci; P. J. Parbrook; M. D. Smith; J. Enslin; F. Mehnke; M. Kneissl; C. Kuhn; T. Wernicke; S. Hagedorn; A. Knauer; V. Kueller; S. Walde; M. Weyers; P. M. Coulon; P. A. Shields; Y. Zhang; L. Jiu; Y. Gong; R. M. Smith; T. Wang; A. Winkelmann

doi:10.1364/PRJ.7.000B73

Scanning electron microscope as a flexible tool for investigating the properties of UV-emitting nitride semiconductor thin films

C. Trager-Cowan, A. Alasmari, W. Avis, J. Bruckbauer, P. R. Edwards, B. Hourahine, S. Kraeusel, G. Kusch, R. Johnston, G. Naresh-Kumar, R. W. Martin, M. Nouf-Allehiani, E. Pascal, L. Spasevski, David Thomson, S. Vespucci, P. J. Parbrook, M. D. Smith, J. Enslin, F. MehnkeM. Kneissl, C. Kuhn, T. Wernicke, S. Hagedorn, A. Knauer, V. Kueller, S. Walde, M. Weyers, P. M. Coulon, P. A. Shields, Y. Zhang, L. Jiu, Y. Gong, R. M. Smith, T. Wang, A. Winkelmann

Research output: Contribution to journal › Article › peer-review

9 Citations (SciVal)

Abstract

In this paper we describe the scanning electron microscopy techniques of electron backscatter diffraction, electron channeling contrast imaging, wavelength dispersive X-ray spectroscopy, and cathodoluminescence hyperspectral imaging. We present our recent results on the use of these non-destructive techniques to obtain information on the topography, crystal misorientation, defect distributions, composition, doping, and light emission from a range of UV-emitting nitride semiconductor structures. We aim to illustrate the developing capability of each of these techniques for understanding the properties of UV-emitting nitride semiconductors, and the benefits were appropriate, in combining the techniques.

Original language	English
Pages (from-to)	B73-B82
Number of pages	10
Journal	Photonics Research
Volume	7
Issue number	11
Early online date	11 Sept 2019
DOIs	https://doi.org/10.1364/PRJ.7.000B73
Publication status	Published - 30 Oct 2019

Funding

Acknowledgment. The authors would like to acknowledge financial support of the Engineering and Physical Sciences Research Council, UK via Grant No. EP/J015792/1, “Nanoscale characterisation of nitride semiconductor thin films using EBSD, ECCI, CL and EBIC”; Grant No. EP/M015181/ 1, “Manufacturing nano-engineered III-nitrides”; and Grant No. EP/P015719/1, “Quantitative non-destructive nanoscale characterisation of advanced materials”. Work at Ferdinand-Braun-Institute and TU Berlin was partially supported by the German “Federal Ministry of Education and Research” (BMBF) within the “Advanced UV for Life” consortium and the “German Research Foundation” (DFG) within the “Collaborative Research Center 787”.

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics

Access to Document

10.1364/PRJ.7.000B73Licence: CC BY

Cite this

Trager-Cowan, C., Alasmari, A., Avis, W., Bruckbauer, J., Edwards, P. R., Hourahine, B., Kraeusel, S., Kusch, G., Johnston, R., Naresh-Kumar, G., Martin, R. W., Nouf-Allehiani, M., Pascal, E., Spasevski, L., Thomson, D., Vespucci, S., Parbrook, P. J., Smith, M. D., Enslin, J., ... Winkelmann, A. (2019). Scanning electron microscope as a flexible tool for investigating the properties of UV-emitting nitride semiconductor thin films. Photonics Research, 7(11), B73-B82. https://doi.org/10.1364/PRJ.7.000B73

Trager-Cowan, C, Alasmari, A, Avis, W, Bruckbauer, J, Edwards, PR, Hourahine, B, Kraeusel, S, Kusch, G, Johnston, R, Naresh-Kumar, G, Martin, RW, Nouf-Allehiani, M, Pascal, E, Spasevski, L, Thomson, D, Vespucci, S, Parbrook, PJ, Smith, MD, Enslin, J, Mehnke, F, Kneissl, M, Kuhn, C, Wernicke, T, Hagedorn, S, Knauer, A, Kueller, V, Walde, S, Weyers, M, Coulon, PM, Shields, PA, Zhang, Y, Jiu, L, Gong, Y, Smith, RM, Wang, T & Winkelmann, A 2019, 'Scanning electron microscope as a flexible tool for investigating the properties of UV-emitting nitride semiconductor thin films', Photonics Research, vol. 7, no. 11, pp. B73-B82. https://doi.org/10.1364/PRJ.7.000B73

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abstract = "In this paper we describe the scanning electron microscopy techniques of electron backscatter diffraction, electron channeling contrast imaging, wavelength dispersive X-ray spectroscopy, and cathodoluminescence hyperspectral imaging. We present our recent results on the use of these non-destructive techniques to obtain information on the topography, crystal misorientation, defect distributions, composition, doping, and light emission from a range of UV-emitting nitride semiconductor structures. We aim to illustrate the developing capability of each of these techniques for understanding the properties of UV-emitting nitride semiconductors, and the benefits were appropriate, in combining the techniques.",

author = "C. Trager-Cowan and A. Alasmari and W. Avis and J. Bruckbauer and Edwards, {P. R.} and B. Hourahine and S. Kraeusel and G. Kusch and R. Johnston and G. Naresh-Kumar and Martin, {R. W.} and M. Nouf-Allehiani and E. Pascal and L. Spasevski and David Thomson and S. Vespucci and Parbrook, {P. J.} and Smith, {M. D.} and J. Enslin and F. Mehnke and M. Kneissl and C. Kuhn and T. Wernicke and S. Hagedorn and A. Knauer and V. Kueller and S. Walde and M. Weyers and Coulon, {P. M.} and Shields, {P. A.} and Y. Zhang and L. Jiu and Y. Gong and Smith, {R. M.} and T. Wang and A. Winkelmann",

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AU - Alasmari, A.

AU - Avis, W.

AU - Bruckbauer, J.

AU - Edwards, P. R.

AU - Hourahine, B.

AU - Kraeusel, S.

AU - Kusch, G.

AU - Johnston, R.

AU - Naresh-Kumar, G.

AU - Martin, R. W.

AU - Nouf-Allehiani, M.

AU - Pascal, E.

AU - Spasevski, L.

AU - Thomson, David

AU - Vespucci, S.

AU - Parbrook, P. J.

AU - Smith, M. D.

AU - Enslin, J.

AU - Mehnke, F.

AU - Kneissl, M.

AU - Kuhn, C.

AU - Wernicke, T.

AU - Hagedorn, S.

AU - Knauer, A.

AU - Kueller, V.

AU - Walde, S.

AU - Weyers, M.

AU - Coulon, P. M.

AU - Shields, P. A.

AU - Zhang, Y.

AU - Jiu, L.

AU - Gong, Y.

AU - Smith, R. M.

AU - Wang, T.

AU - Winkelmann, A.

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Scanning electron microscope as a flexible tool for investigating the properties of UV-emitting nitride semiconductor thin films

Abstract

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Manufacturing of Nano-Engineered III-N Semiconductors

Manufacturing of Nano-Engineered III-N Semiconductors - Equipment

Philip Shields

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Scanning electron microscope as a flexible tool for investigating the properties of UV-emitting nitride semiconductor thin films

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ASJC Scopus subject areas

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Manufacturing of Nano-Engineered III-N Semiconductors

Manufacturing of Nano-Engineered III-N Semiconductors - Equipment

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Philip Shields

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