Scanning electron microscope as a flexible tool for investigating the properties of UV-emitting nitride semiconductor thin films

C. Trager-Cowan, A. Alasmari, W. Avis, J. Bruckbauer, P. R. Edwards, B. Hourahine, S. Kraeusel, G. Kusch, R. Johnston, G. Naresh-Kumar, R. W. Martin, M. Nouf-Allehiani, E. Pascal, L. Spasevski, David Thomson, S. Vespucci, P. J. Parbrook, M. D. Smith, J. Enslin, F. MehnkeM. Kneissl, C. Kuhn, T. Wernicke, S. Hagedorn, A. Knauer, V. Kueller, S. Walde, M. Weyers, P. M. Coulon, P. A. Shields, Y. Zhang, L. Jiu, Y. Gong, R. M. Smith, T. Wang, A. Winkelmann

Research output: Contribution to journalArticlepeer-review

9 Citations (SciVal)

Abstract

In this paper we describe the scanning electron microscopy techniques of electron backscatter diffraction, electron channeling contrast imaging, wavelength dispersive X-ray spectroscopy, and cathodoluminescence hyperspectral imaging. We present our recent results on the use of these non-destructive techniques to obtain information on the topography, crystal misorientation, defect distributions, composition, doping, and light emission from a range of UV-emitting nitride semiconductor structures. We aim to illustrate the developing capability of each of these techniques for understanding the properties of UV-emitting nitride semiconductors, and the benefits were appropriate, in combining the techniques.

Original languageEnglish
Pages (from-to)B73-B82
Number of pages10
JournalPhotonics Research
Volume7
Issue number11
Early online date11 Sept 2019
DOIs
Publication statusPublished - 30 Oct 2019

Funding

Acknowledgment. The authors would like to acknowledge financial support of the Engineering and Physical Sciences Research Council, UK via Grant No. EP/J015792/1, “Nanoscale characterisation of nitride semiconductor thin films using EBSD, ECCI, CL and EBIC”; Grant No. EP/M015181/ 1, “Manufacturing nano-engineered III-nitrides”; and Grant No. EP/P015719/1, “Quantitative non-destructive nanoscale characterisation of advanced materials”. Work at Ferdinand-Braun-Institute and TU Berlin was partially supported by the German “Federal Ministry of Education and Research” (BMBF) within the “Advanced UV for Life” consortium and the “German Research Foundation” (DFG) within the “Collaborative Research Center 787”.

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics

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