Room-temperature evolution of vacancy-type damage created by 2 keV B+ implantation of Si

R M Gwilliam, A P Knights, C P Burrows, P G Coleman

Research output: Contribution to journalArticlepeer-review

2 Citations (SciVal)
Original languageEnglish
Pages (from-to)427-430
Number of pages4
JournalJournal of Vacuum Science & Technology B
Volume20 Jan-Feb
Issue number1
Publication statusPublished - 2002

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