Rocking disc electro-deposition of copper films on Mo/MoSe2 substrates

Charles Y Cummings, Paul E Frith, Guillaume Zoppi, Ian Forbes, Keith D Rogers, David W Lane, Frank Marken

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5 Citations (Scopus)

Abstract

A novel electro-deposition method based on a rocking disc system with /3 amplitude and variable frequency is introduced. Uniform copper films were deposited from a 0.1 M CuSO4/3.0 M NaOH/0.2 M sorbitol bath directly onto 12.1 cm2 Mo/MoSe2 substrates with X-ray diffraction showing a thickness variation of 5% over this area. Investigation of the mass transport conditions suggests (i) uniform diffusion over the sample, (ii) a rate of mass transport proportional to the square root of the rocking rate, and (iii) turbulent conditions, which are able to dislodge gas bubbles during electro-deposition.
Original languageEnglish
Pages (from-to)7458-7463
Number of pages6
JournalThin Solid Films
Volume519
Issue number21
DOIs
Publication statusPublished - Aug 2011

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    Cummings, C. Y., Frith, P. E., Zoppi, G., Forbes, I., Rogers, K. D., Lane, D. W., & Marken, F. (2011). Rocking disc electro-deposition of copper films on Mo/MoSe2 substrates. Thin Solid Films, 519(21), 7458-7463. https://doi.org/10.1016/j.tsf.2010.12.107