Recent developments in molecular precursors for atomic layer deposition

Andrew L. Johnson, James D. Parish

Research output: Chapter or section in a book/report/conference proceedingChapter or section

23 Citations (SciVal)


One field of organometallic and materials chemistry that has seen great advancements over the last 20 years is that of atomic layer deposition (ALD), and in particular the development of precursors for the deposition of thin films of highly functional materials. This review focuses on newly developed ALD precursors for metals and metalloid elements (Groups I to XV). New precursors are necessary for a wide range of both established and emerging high-tech applications. A brief overview of recent advances in precursor chemistry is given.

Original languageEnglish
Title of host publicationOrganometallic Chemistry
EditorsNathan J. Patmore, Paul Elliott
PublisherRoyal Society of Chemistry
Number of pages53
ISBN (Electronic)9781788010054
Publication statusPublished - 23 Nov 2018

Publication series

NameOrganometallic Chemistry
ISSN (Print)0301-0074

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Organic Chemistry
  • Inorganic Chemistry


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