Proposal for micromachined accelerometer, based on a contactless suspension with zero spring constant

Kirill V. Poletkin; Alexsandr I. Chernomorsky; Christopher Shearwood

doi:10.1109/JSEN.2012.2188831

Proposal for micromachined accelerometer, based on a contactless suspension with zero spring constant

Kirill V. Poletkin, Alexsandr I. Chernomorsky, Christopher Shearwood

Research output: Contribution to journal › Article › peer-review

31 Citations (SciVal)

Abstract

In this paper, a micromachined accelerometer, based on a contactless suspension with a zero spring constant is proposed. The sensor provides the possibility of a significant increase in resolution. Minimization of the spring constant of the contactless suspension is achieved by combining inductive and electrical contactless suspensions. To study the conditions required to eliminate the spring constant of the suspension and achieve stable levitation of the accelerometer proof mass, a mathematical model of the suspension is developed. It is shown that such a suspension can be developed in principle.

Original language	English
Article number	6159054
Pages (from-to)	2407-2413
Number of pages	7
Journal	IEEE Sensors Journal
Volume	12
Issue number	7
DOIs	https://doi.org/10.1109/JSEN.2012.2188831
Publication status	Published - 28 Feb 2012

Keywords

Contactless suspension
inertial sensor
levitation
microelectromechanical systems

ASJC Scopus subject areas

Instrumentation
Electrical and Electronic Engineering

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10.1109/JSEN.2012.2188831

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@article{1225b529db594fa48479d131d444388f,

title = "Proposal for micromachined accelerometer, based on a contactless suspension with zero spring constant",

abstract = "In this paper, a micromachined accelerometer, based on a contactless suspension with a zero spring constant is proposed. The sensor provides the possibility of a significant increase in resolution. Minimization of the spring constant of the contactless suspension is achieved by combining inductive and electrical contactless suspensions. To study the conditions required to eliminate the spring constant of the suspension and achieve stable levitation of the accelerometer proof mass, a mathematical model of the suspension is developed. It is shown that such a suspension can be developed in principle.",

keywords = "Contactless suspension, inertial sensor, levitation, microelectromechanical systems",

author = "Poletkin, {Kirill V.} and Chernomorsky, {Alexsandr I.} and Christopher Shearwood",

year = "2012",

month = feb,

day = "28",

doi = "10.1109/JSEN.2012.2188831",

language = "English",

volume = "12",

pages = "2407--2413",

journal = "IEEE Sensors Journal",

issn = "1530-437X",

publisher = "IEEE",

number = "7",

}

TY - JOUR

T1 - Proposal for micromachined accelerometer, based on a contactless suspension with zero spring constant

AU - Poletkin, Kirill V.

AU - Chernomorsky, Alexsandr I.

AU - Shearwood, Christopher

PY - 2012/2/28

Y1 - 2012/2/28

N2 - In this paper, a micromachined accelerometer, based on a contactless suspension with a zero spring constant is proposed. The sensor provides the possibility of a significant increase in resolution. Minimization of the spring constant of the contactless suspension is achieved by combining inductive and electrical contactless suspensions. To study the conditions required to eliminate the spring constant of the suspension and achieve stable levitation of the accelerometer proof mass, a mathematical model of the suspension is developed. It is shown that such a suspension can be developed in principle.

AB - In this paper, a micromachined accelerometer, based on a contactless suspension with a zero spring constant is proposed. The sensor provides the possibility of a significant increase in resolution. Minimization of the spring constant of the contactless suspension is achieved by combining inductive and electrical contactless suspensions. To study the conditions required to eliminate the spring constant of the suspension and achieve stable levitation of the accelerometer proof mass, a mathematical model of the suspension is developed. It is shown that such a suspension can be developed in principle.

KW - Contactless suspension

KW - inertial sensor

KW - levitation

KW - microelectromechanical systems

UR - http://www.scopus.com/inward/record.url?scp=84861839242&partnerID=8YFLogxK

U2 - 10.1109/JSEN.2012.2188831

DO - 10.1109/JSEN.2012.2188831

M3 - Article

AN - SCOPUS:84861839242

SN - 1530-437X

VL - 12

SP - 2407

EP - 2413

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

IS - 7

M1 - 6159054

ER -

Proposal for micromachined accelerometer, based on a contactless suspension with zero spring constant

Abstract

Keywords

ASJC Scopus subject areas

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