Original language | English |
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Pages (from-to) | 698-701 |
Number of pages | 4 |
Journal | Journal of Applied Physics |
Volume | 93 |
Issue number | 1 |
Publication status | Published - 2003 |
Positron annihilation spectroscopy as a diagnostic tool for process monitoring of buried oxide layer formation in Si
P G Coleman, A P Knights, M J Anc
Research output: Contribution to journal › Article › peer-review
3
Citations
(SciVal)