Positron annihilation spectroscopy as a diagnostic tool for process monitoring of buried oxide layer formation in Si

P G Coleman, A P Knights, M J Anc

Research output: Contribution to journalArticlepeer-review

3 Citations (SciVal)
Original languageEnglish
Pages (from-to)698-701
Number of pages4
JournalJournal of Applied Physics
Issue number1
Publication statusPublished - 2003

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