Porous silicon bulk acoustic wave resonator with integrated transducer

G.N. Aliev; B. Goller; P.A. Snow; H. Heinrich; B. Yuan; R. Aigner

doi:10.1186/1556-276X-7-378

Porous silicon bulk acoustic wave resonator with integrated transducer

G.N. Aliev, B. Goller, P.A. Snow, H. Heinrich, B. Yuan, R. Aigner

Department of Physics

Research output: Contribution to journal › Article › peer-review

9 Citations (SciVal)

Abstract

We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator.

Original language	English
Article number	378
Number of pages	6
Journal	Nanoscale Research Letters
Volume	7
Early online date	8 Jul 2012
DOIs	https://doi.org/10.1186/1556-276X-7-378
Publication status	Published - Jul 2012

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10.1186/1556-276X-7-378

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title = "Porous silicon bulk acoustic wave resonator with integrated transducer",

abstract = "We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator. ",

author = "G.N. Aliev and B. Goller and P.A. Snow and H. Heinrich and B. Yuan and R. Aigner",

year = "2012",

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AU - Aliev, G.N.

AU - Goller, B.

AU - Snow, P.A.

AU - Heinrich, H.

AU - Yuan, B.

AU - Aigner, R.

PY - 2012/7

Y1 - 2012/7

N2 - We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator.

AB - We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator.

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UR - http://dx.doi.org/10.1186/1556-276X-7-378

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DO - 10.1186/1556-276X-7-378

M3 - Article

SN - 1931-7573

VL - 7

JO - Nanoscale Research Letters

JF - Nanoscale Research Letters

M1 - 378

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Porous silicon bulk acoustic wave resonator with integrated transducer

Abstract

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Spin-Dependent Phenomena Mediated by Silicon Nanocrystal Assemblies

SOUND-LIGHT INTERACTIONS IN SPATIALLY PERIOD NANOPOROUS SILI CON STRUCTURES

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Porous silicon bulk acoustic wave resonator with integrated transducer

Abstract

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Spin-Dependent Phenomena Mediated by Silicon Nanocrystal Assemblies

SOUND-LIGHT INTERACTIONS IN SPATIALLY PERIOD NANOPOROUS SILI CON STRUCTURES

Cite this