Porous silicon bulk acoustic wave resonator with integrated transducer

G.N. Aliev, B. Goller, P.A. Snow, H. Heinrich, B. Yuan, R. Aigner

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator.
Original languageEnglish
Article number378
Number of pages6
JournalNanoscale Research Letters
Volume7
Early online date8 Jul 2012
DOIs
Publication statusPublished - Jul 2012

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