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We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator.
|Number of pages||6|
|Journal||Nanoscale Research Letters|
|Early online date||8 Jul 2012|
|Publication status||Published - Jul 2012|
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- 1 Finished
SOUND-LIGHT INTERACTIONS IN SPATIALLY PERIOD NANOPOROUS SILI CON STRUCTURES
Snow, P., Birks, T. & Russell, P. S.
Engineering and Physical Sciences Research Council
5/09/05 → 4/02/10
Project: Research council