Oxygen-related vacancy-type defects in ion-implanted silicon

X D Pi, C P Burrows, P G Coleman, R M Gwilliam, B J Sealy

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)
Original languageEnglish
Pages (from-to)S2825-S2833
JournalJournal of Physics-Condensed Matter
Volume15
Issue number39
Publication statusPublished - 2003

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