Optimisation of processing conditions during CVD growth of 2D WS₂ films from a chloride precursor

William R. Campbell, Francesco Reale, Ravi Sundaram, Simon J. Bending

Oxford Instruments Plasma Technology

Research output: Contribution to journal › Article › peer-review

5 Citations (SciVal)

8 Downloads (Pure)

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Raman confocal microscope RENISHAM INVIA
Material and Chemical Characterisation (MC2)
Facility/equipment: Equipment