Optimisation of processing conditions during CVD growth of 2D WS₂ films from a chloride precursor

William R. Campbell, Francesco Reale, Ravi Sundaram, Simon J. Bending

Oxford Instruments Plasma Technology

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Dataset for "Optimisation of processing conditions during CVD growth of 2D WS2 films from a chloride precursor"
Campbell, W. (Creator), Reale, F. (Creator), Ravi, S. (Creator) & Bending, S. (Creator), University of Bath, 3 Jan 2022
DOI: 10.15125/BATH-01104
Dataset