On the optical properties of SLS ELA polycrystalline silicon films

Despina C. Moschou; Nikolaos Vourdas; Dimitrios Davazoglou; Dimitrios N. Kouvatsos; Vassilis Emm Vamvakas; Apostolos T. Voutsas

doi:10.1016/j.mee.2011.04.032

On the optical properties of SLS ELA polycrystalline silicon films

Despina C. Moschou
, Nikolaos Vourdas
, Dimitrios Davazoglou
, Dimitrios N. Kouvatsos
, Vassilis Emm Vamvakas
, Apostolos T. Voutsas

Department of Electronic & Electrical Engineering

National Centre for Scientific Research “Demokritos”
Sharp Labs of America

Research output: Contribution to journal › Article › peer-review

6 Citations (SciVal)

Abstract

In this work we investigate optical properties of SLS-ELA poly-Si films. UV-visible spectroscopy yielded the film refractive index n and extinction coefficient k. We also employed spectroscopic ellipsometry measurements. All SLS-ELA films showed similar behavior with respect to their optical properties, however very different from a-Si and c-Si. The XRD spectra acquired exhibited a prevailing peak angle at around 21.5°, which, according to literature, corresponds to a Si modification named allo-Si. The above indicate that possibly SLS-ELA Si films have a crystallographic structure similar to allo-Si.

Original language	English
Pages (from-to)	69-71
Number of pages	3
Journal	Microelectronic Engineering
Volume	90
DOIs	https://doi.org/10.1016/j.mee.2011.04.032
Publication status	Published - Feb 2012

Keywords

Allo-Si
Optical characterization
Poly-Si
Polysilcon SLS ELA

ASJC Scopus subject areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Surfaces, Coatings and Films
Atomic and Molecular Physics, and Optics
Condensed Matter Physics

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10.1016/j.mee.2011.04.032

https://doi.org/10.1016/j.mee.2011.04.032

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title = "On the optical properties of SLS ELA polycrystalline silicon films",

abstract = "In this work we investigate optical properties of SLS-ELA poly-Si films. UV-visible spectroscopy yielded the film refractive index n and extinction coefficient k. We also employed spectroscopic ellipsometry measurements. All SLS-ELA films showed similar behavior with respect to their optical properties, however very different from a-Si and c-Si. The XRD spectra acquired exhibited a prevailing peak angle at around 21.5°, which, according to literature, corresponds to a Si modification named allo-Si. The above indicate that possibly SLS-ELA Si films have a crystallographic structure similar to allo-Si.",

keywords = "Allo-Si, Optical characterization, Poly-Si, Polysilcon SLS ELA",

author = "Moschou, \{Despina C.\} and Nikolaos Vourdas and Dimitrios Davazoglou and Kouvatsos, \{Dimitrios N.\} and Vamvakas, \{Vassilis Emm\} and Voutsas, \{Apostolos T.\}",

year = "2012",

month = feb,

doi = "10.1016/j.mee.2011.04.032",

language = "English",

volume = "90",

pages = "69--71",

journal = "Microelectronic Engineering",

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T1 - On the optical properties of SLS ELA polycrystalline silicon films

AU - Moschou, Despina C.

AU - Vourdas, Nikolaos

AU - Davazoglou, Dimitrios

AU - Kouvatsos, Dimitrios N.

AU - Vamvakas, Vassilis Emm

AU - Voutsas, Apostolos T.

PY - 2012/2

Y1 - 2012/2

N2 - In this work we investigate optical properties of SLS-ELA poly-Si films. UV-visible spectroscopy yielded the film refractive index n and extinction coefficient k. We also employed spectroscopic ellipsometry measurements. All SLS-ELA films showed similar behavior with respect to their optical properties, however very different from a-Si and c-Si. The XRD spectra acquired exhibited a prevailing peak angle at around 21.5°, which, according to literature, corresponds to a Si modification named allo-Si. The above indicate that possibly SLS-ELA Si films have a crystallographic structure similar to allo-Si.

AB - In this work we investigate optical properties of SLS-ELA poly-Si films. UV-visible spectroscopy yielded the film refractive index n and extinction coefficient k. We also employed spectroscopic ellipsometry measurements. All SLS-ELA films showed similar behavior with respect to their optical properties, however very different from a-Si and c-Si. The XRD spectra acquired exhibited a prevailing peak angle at around 21.5°, which, according to literature, corresponds to a Si modification named allo-Si. The above indicate that possibly SLS-ELA Si films have a crystallographic structure similar to allo-Si.

KW - Allo-Si

KW - Optical characterization

KW - Poly-Si

KW - Polysilcon SLS ELA

UR - https://www.scopus.com/pages/publications/82555174454

UR - https://doi.org/10.1016/j.mee.2011.04.032

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DO - 10.1016/j.mee.2011.04.032

M3 - Article

AN - SCOPUS:82555174454

SN - 0167-9317

VL - 90

SP - 69

EP - 71

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -

On the optical properties of SLS ELA polycrystalline silicon films

Abstract

Keywords

ASJC Scopus subject areas

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