On the optical properties of SLS ELA polycrystalline silicon films

Despina C. Moschou, Nikolaos Vourdas, Dimitrios Davazoglou, Dimitrios N. Kouvatsos, Vassilis Emm Vamvakas, Apostolos T. Voutsas

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

In this work we investigate optical properties of SLS-ELA poly-Si films. UV-visible spectroscopy yielded the film refractive index n and extinction coefficient k. We also employed spectroscopic ellipsometry measurements. All SLS-ELA films showed similar behavior with respect to their optical properties, however very different from a-Si and c-Si. The XRD spectra acquired exhibited a prevailing peak angle at around 21.5°, which, according to literature, corresponds to a Si modification named allo-Si. The above indicate that possibly SLS-ELA Si films have a crystallographic structure similar to allo-Si.

Original languageEnglish
Pages (from-to)69-71
Number of pages3
JournalMicroelectronic Engineering
Volume90
DOIs
Publication statusPublished - Feb 2012

Keywords

  • Allo-Si
  • Optical characterization
  • Poly-Si
  • Polysilcon SLS ELA

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics

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