Abstract
In searching for ideal unimolecular precursors to group 13 nitrides we have begun examining two new classes of molecules having the formulae, RnM(tet)3-n (n = 0, 1, 2) and Bn2MN3 (where M = A1, Ga; tet = 5-phenyl-1H-tetrazole, and Bn= benzyl). These may be anticipated to undergo low-temperature decompositions according to equations 1 and 2, respectively. The absence of carbon bonds to the nitrogen ultimately incorporated into the material, as well as the presence of excess nitrogen are viewed as particularly advantageous. Preliminary results focused on the formation of aluminum nitride are presented herein. M(tet)3 → MN + N2 + PhCN (1) Bn2MN3 → MN + N2 + Bn2 (2).
Original language | English |
---|---|
Pages (from-to) | 183-192 |
Number of pages | 10 |
Journal | Phosphorus, Sulfur and Silicon and Related Elements |
Volume | 124 |
DOIs | |
Publication status | Published - 1 Jan 1997 |
Keywords
- Aluminum nitride
- Precursor
ASJC Scopus subject areas
- Biochemistry
- Organic Chemistry
- Inorganic Chemistry