New materials for micro-scale sensors and actuators An engineering review

S A Wilson; R P J Jourdain; Q Zhang; R A Dorey; C R Bowen; M Willander; Q U Wahab; M A H Safaa; O Nur; E Quandt; C Johansson; E Pagounis; M Kohl; J Matovic; B Samel; W van der Wijngaart; E W H Jager; D Carlsson; Z Djinovic; M Wegener; C Moldovan; R Iosub; E Abad; M Wendlandt; C Rusu; K Persson

doi:10.1016/j.mser.2007.03.001

New materials for micro-scale sensors and actuators An engineering review

S A Wilson, R P J Jourdain, Q Zhang, R A Dorey, C R Bowen, M Willander, Q U Wahab, M A H Safaa, O Nur, E Quandt, C Johansson, E Pagounis, M Kohl, J Matovic, B Samel, W van der Wijngaart, E W H Jager, D Carlsson, Z Djinovic, M WegenerC Moldovan, R Iosub, E Abad, M Wendlandt, C Rusu, K Persson

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

485 Citations (SciVal)

Abstract

This paper provides a detailed overview of developments in transducer materials technology relating to their current and future applications in micro-scale devices. Recent advances in piezoelectric, magnetostrictive and shape-memory alloy systems are discussed and emerging transducer materials such as magnetic nanoparticles, expandable micro-spheres and conductive polymers are introduced. Materials properties, transducer mechanisms and end applications are described and the potential for integration of the materials with ancillary systems components is viewed as an essential consideration. The review concludes with a short discussion of structural polymers that are extending the range of micro-fabrication techniques available to designers and production engineers beyond the limitations of silicon fabrication technology. (C) 2007 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	1-129
Number of pages	129
Journal	Materials Science & Engineering R - Reports
Volume	56
DOIs	https://doi.org/10.1016/j.mser.2007.03.001
Publication status	Published - 2007

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Wilson, S. A., Jourdain, R. P. J., Zhang, Q., Dorey, R. A., Bowen, C. R., Willander, M., Wahab, Q. U., Safaa, M. A. H., Nur, O., Quandt, E., Johansson, C., Pagounis, E., Kohl, M., Matovic, J., Samel, B., van der Wijngaart, W., Jager, E. W. H., Carlsson, D., Djinovic, Z., ... Persson, K. (2007). New materials for micro-scale sensors and actuators An engineering review. Materials Science & Engineering R - Reports, 56, 1-129. https://doi.org/10.1016/j.mser.2007.03.001

Wilson, SA, Jourdain, RPJ, Zhang, Q, Dorey, RA, Bowen, CR, Willander, M, Wahab, QU, Safaa, MAH, Nur, O, Quandt, E, Johansson, C, Pagounis, E, Kohl, M, Matovic, J, Samel, B, van der Wijngaart, W, Jager, EWH, Carlsson, D, Djinovic, Z, Wegener, M, Moldovan, C, Iosub, R, Abad, E, Wendlandt, M, Rusu, C & Persson, K 2007, 'New materials for micro-scale sensors and actuators An engineering review', Materials Science & Engineering R - Reports, vol. 56, pp. 1-129. https://doi.org/10.1016/j.mser.2007.03.001

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title = "New materials for micro-scale sensors and actuators An engineering review",

abstract = "This paper provides a detailed overview of developments in transducer materials technology relating to their current and future applications in micro-scale devices. Recent advances in piezoelectric, magnetostrictive and shape-memory alloy systems are discussed and emerging transducer materials such as magnetic nanoparticles, expandable micro-spheres and conductive polymers are introduced. Materials properties, transducer mechanisms and end applications are described and the potential for integration of the materials with ancillary systems components is viewed as an essential consideration. The review concludes with a short discussion of structural polymers that are extending the range of micro-fabrication techniques available to designers and production engineers beyond the limitations of silicon fabrication technology. (C) 2007 Elsevier B.V. All rights reserved.",

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doi = "10.1016/j.mser.2007.03.001",

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AU - Wilson, S A

AU - Jourdain, R P J

AU - Zhang, Q

AU - Dorey, R A

AU - Bowen, C R

AU - Willander, M

AU - Wahab, Q U

AU - Safaa, M A H

AU - Nur, O

AU - Quandt, E

AU - Johansson, C

AU - Pagounis, E

AU - Kohl, M

AU - Matovic, J

AU - Samel, B

AU - van der Wijngaart, W

AU - Jager, E W H

AU - Carlsson, D

AU - Djinovic, Z

AU - Wegener, M

AU - Moldovan, C

AU - Iosub, R

AU - Abad, E

AU - Wendlandt, M

AU - Rusu, C

AU - Persson, K

PY - 2007

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AB - This paper provides a detailed overview of developments in transducer materials technology relating to their current and future applications in micro-scale devices. Recent advances in piezoelectric, magnetostrictive and shape-memory alloy systems are discussed and emerging transducer materials such as magnetic nanoparticles, expandable micro-spheres and conductive polymers are introduced. Materials properties, transducer mechanisms and end applications are described and the potential for integration of the materials with ancillary systems components is viewed as an essential consideration. The review concludes with a short discussion of structural polymers that are extending the range of micro-fabrication techniques available to designers and production engineers beyond the limitations of silicon fabrication technology. (C) 2007 Elsevier B.V. All rights reserved.

U2 - 10.1016/j.mser.2007.03.001

DO - 10.1016/j.mser.2007.03.001

M3 - Article

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VL - 56

SP - 1

EP - 129

JO - Materials Science & Engineering R - Reports

JF - Materials Science & Engineering R - Reports

ER -

New materials for micro-scale sensors and actuators An engineering review

Abstract

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