Lithium niobate (LiNbO3) is used in applications such as in optoelectronics, surface acoustic wave devices and transducers. In this paper nano-patterning of LiNbO3 wafers at the wafer scale is investigated using a novel low cost and large-area nano-imprinting technique. The formation of nano-scale pillars is presented by nano-imprinting an ordered nickel etch mask by lift-off on a y-cut LiNbO3 wafer. The process lends itself to the development of novel sensors or high temperature nano-scale harvesting structures. Since one potential application for nano-pillars of piezoelectrics is energy harvesting, calculations of relevant figures of merit for LiNbO3 based composites are also presented.
Lewis, R. W. C., Allsopp, D. W. E., Shields, P., Šatka, A., Yu, S., Topolov, V. Y., & Bowen, C. R. (2012). Nano-Imprinting of Highly Ordered Nano-Pillars of Lithium Niobate (LiNbO3). Ferroelectrics, 429(1), 62-68. https://doi.org/10.1080/00150193.2012.676955