Nano-Imprinting of Highly Ordered Nano-Pillars of Lithium Niobate (LiNbO3)

R. W. C. Lewis; D. W. E. Allsopp; P. Shields; A. Šatka; S. Yu; V. Yu. Topolov; C. R. Bowen

doi:10.1080/00150193.2012.676955

Nano-Imprinting of Highly Ordered Nano-Pillars of Lithium Niobate (LiNbO3)

R. W. C. Lewis, D. W. E. Allsopp, P. Shields, A. Šatka, S. Yu, V. Yu. Topolov, C. R. Bowen

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Abstract

Lithium niobate (LiNbO3) is used in applications such as in optoelectronics, surface acoustic wave devices and transducers. In this paper nano-patterning of LiNbO3 wafers at the wafer scale is investigated using a novel low cost and large-area nano-imprinting technique. The formation of nano-scale pillars is presented by nano-imprinting an ordered nickel etch mask by lift-off on a y-cut LiNbO3 wafer. The process lends itself to the development of novel sensors or high temperature nano-scale harvesting structures. Since one potential application for nano-pillars of piezoelectrics is energy harvesting, calculations of relevant figures of merit for LiNbO3 based composites are also presented.

Original language	Undefined/Unknown
Pages (from-to)	62-68
Number of pages	7
Journal	Ferroelectrics
Volume	429
Issue number	1
DOIs	https://doi.org/10.1080/00150193.2012.676955
Publication status	Published - 1 Jan 2012

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10.1080/00150193.2012.676955

Authors' version
This is an electronic version of an article published in Lewis, R. W. C., Allsopp, D. W. E., Shields, P., Šatka, A., Yu, S., Topolov, V. Y. and Bowen, C. R., 2012. Nano-Imprinting of Highly Ordered Nano-Pillars of Lithium Niobate (LiNbO3). Ferroelectrics, 429 (1), pp. 62-68. Ferroelectrics is available online at http://dx.doi.org/10.1080/00150193.2012.676955
Accepted author manuscript, 1.13 MB

Cite this

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title = "Nano-Imprinting of Highly Ordered Nano-Pillars of Lithium Niobate (LiNbO3)",

abstract = "Lithium niobate (LiNbO3) is used in applications such as in optoelectronics, surface acoustic wave devices and transducers. In this paper nano-patterning of LiNbO3 wafers at the wafer scale is investigated using a novel low cost and large-area nano-imprinting technique. The formation of nano-scale pillars is presented by nano-imprinting an ordered nickel etch mask by lift-off on a y-cut LiNbO3 wafer. The process lends itself to the development of novel sensors or high temperature nano-scale harvesting structures. Since one potential application for nano-pillars of piezoelectrics is energy harvesting, calculations of relevant figures of merit for LiNbO3 based composites are also presented.",

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AU - Shields, P.

AU - Šatka, A.

AU - Yu, S.

AU - Topolov, V. Yu.

AU - Bowen, C. R.

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AB - Lithium niobate (LiNbO3) is used in applications such as in optoelectronics, surface acoustic wave devices and transducers. In this paper nano-patterning of LiNbO3 wafers at the wafer scale is investigated using a novel low cost and large-area nano-imprinting technique. The formation of nano-scale pillars is presented by nano-imprinting an ordered nickel etch mask by lift-off on a y-cut LiNbO3 wafer. The process lends itself to the development of novel sensors or high temperature nano-scale harvesting structures. Since one potential application for nano-pillars of piezoelectrics is energy harvesting, calculations of relevant figures of merit for LiNbO3 based composites are also presented.

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Nano-Imprinting of Highly Ordered Nano-Pillars of Lithium Niobate (LiNbO3)

Abstract

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Disposable Masters: A Low Cost Route to Manufacture Nanostructured Materials

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Nano-Imprinting of Highly Ordered Nano-Pillars of Lithium Niobate (LiNbO3)

Abstract

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Projects

Disposable Masters: A Low Cost Route to Manufacture Nanostructured Materials

Equipment

David Bullett Nanofabrication Facility

EVG 620 NanoImprint Lithography

Veeco 6M Dektak Surface Profiler

Cite this