Nano-Imprinting of Highly Ordered Nano-Pillars of Lithium Niobate (LiNbO3)

R. W. C. Lewis, D. W. E. Allsopp, P. Shields, A. Šatka, S. Yu, V. Yu. Topolov, C. R. Bowen

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Abstract

Lithium niobate (LiNbO3) is used in applications such as in optoelectronics, surface acoustic wave devices and transducers. In this paper nano-patterning of LiNbO3 wafers at the wafer scale is investigated using a novel low cost and large-area nano-imprinting technique. The formation of nano-scale pillars is presented by nano-imprinting an ordered nickel etch mask by lift-off on a y-cut LiNbO3 wafer. The process lends itself to the development of novel sensors or high temperature nano-scale harvesting structures. Since one potential application for nano-pillars of piezoelectrics is energy harvesting, calculations of relevant figures of merit for LiNbO3 based composites are also presented.
Original languageUndefined/Unknown
Pages (from-to)62-68
Number of pages7
JournalFerroelectrics
Volume429
Issue number1
DOIs
Publication statusPublished - 1 Jan 2012

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