Modelling and designing GaN piezeoelectric MEMS,

CR Bowen, DWE Allsopp, R Stevens, P Shields, WN Wang

Research output: Contribution to conferencePaper

Original languageEnglish
Publication statusPublished - 2006
EventSecond International Conference on Multi-Material Micro Manufacture - Grenoble
Duration: 1 Jan 2006 → …

Conference

ConferenceSecond International Conference on Multi-Material Micro Manufacture
CityGrenoble
Period1/01/06 → …

Cite this

Bowen, CR., Allsopp, DWE., Stevens, R., Shields, P., & Wang, WN. (2006). Modelling and designing GaN piezeoelectric MEMS,. Paper presented at Second International Conference on Multi-Material Micro Manufacture, Grenoble, .