Modelling and designing GaN piezeoelectric MEMS,

CR Bowen, DWE Allsopp, R Stevens, P Shields, WN Wang

Research output: Contribution to conference › Paper

Original language	English
Publication status	Published - 2006
Event	Second International Conference on Multi-Material Micro Manufacture - Grenoble Duration: 1 Jan 2006 → …

Conference	Second International Conference on Multi-Material Micro Manufacture
City	Grenoble
Period	1/01/06 → …

Equipment