Modelling and designing GaN piezeoelectric MEMS,

CR Bowen, DWE Allsopp, R Stevens, P Shields, WN Wang

Research output: Contribution to conferencePaper

Original languageEnglish
Publication statusPublished - 2006
EventSecond International Conference on Multi-Material Micro Manufacture - Grenoble
Duration: 1 Jan 2006 → …

Conference

ConferenceSecond International Conference on Multi-Material Micro Manufacture
CityGrenoble
Period1/01/06 → …

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