Micromachined III-V cantilevers for AFM-tracking scanning hall probe microscopy

A J Brook, S J Bending, J Pinto, A Oral, D Ritchie, H Beere, A Springthorpe, M Henini

Research output: Contribution to journalArticlepeer-review

24 Citations (SciVal)
Original languageEnglish
Pages (from-to)124-128
Number of pages5
JournalJournal of Micromechanics and Microengineering
Issue number1
Publication statusPublished - 2003

Bibliographical note

ID number: ISI:000180628400017

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