Micromachined contactless suspensions

Micromachined contactless suspension (CS) or non-contact bearing technology is a comparatively recent concept. This has already attracted a great deal of attention giving rise to a new generation of micromachined or Micro-Electro-Mechanical Systems (MEMS) inertial sensors [1-6] as well as inertial multisensors [7-9]. Eliminating the mechanical attachment or contact friction in the suspension of a MEMS sensor is the major issue addressed by such technology. This issue leads to, on the one hand, a decreasing value of mechanical-thermal noise [10] and, consequently, an increase in the sensitivity of the sensors and their accuracies [4]. On the other hand, an extension of the lifetime and long-term stability of sensors becomes possible [11].