| Original language | English |
|---|---|
| Patent number | EP4713500 |
| IPC | C23C 16/ 455 A I |
| Priority date | 17/05/24 |
| Publication status | Published - 25 Mar 2026 |
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METHODS FOR DEPOSITING METAL-CONTAINING FILMS ON SUBSTRATES
- Andrew. L Johnson (Inventor)
- , James. D Parish (Inventor)
Research output: Patent