Abstract
The work described in this poster show that the method presented for studying dissolution processes in this polymer films is potentially extremely beneficial for application to resist systems. Results were produced comparable to those of other workers and had shown that a range of effects of fundamental significance to the dissolution process in polymers was studied. There are few, if any, limitations on the types of polymer that dissolution rates can be examined. The crystals are small and may be conveniently introduced into irradiation systems under conditions extremely close to those used for commercial resist development. The major advantages are the results obtained in less time and more cost-effectively.
| Original language | English |
|---|---|
| Pages (from-to) | 1255-1262 |
| Number of pages | 8 |
| Journal | Macromolecular reports |
| Volume | 31 |
| Issue number | Suppl 6-7 |
| Publication status | Published - 1 Dec 1994 |
| Event | Proceedings of the 3rd Euro-American Conference on Functional Polymers and Biopolymers, Macromolecules '92 - Canterbury, UK Duration: 7 Sept 1992 → 11 Sept 1992 |
ASJC Scopus subject areas
- Engineering(all)