Measurement of dissolution kinetics of thin polymer films

Gareth J. Price, Jill M. Buley

Research output: Contribution to journalConference articlepeer-review

Abstract

The work described in this poster show that the method presented for studying dissolution processes in this polymer films is potentially extremely beneficial for application to resist systems. Results were produced comparable to those of other workers and had shown that a range of effects of fundamental significance to the dissolution process in polymers was studied. There are few, if any, limitations on the types of polymer that dissolution rates can be examined. The crystals are small and may be conveniently introduced into irradiation systems under conditions extremely close to those used for commercial resist development. The major advantages are the results obtained in less time and more cost-effectively.

Original languageEnglish
Pages (from-to)1255-1262
Number of pages8
JournalMacromolecular reports
Volume31
Issue numberSuppl 6-7
Publication statusPublished - 1 Dec 1994
EventProceedings of the 3rd Euro-American Conference on Functional Polymers and Biopolymers, Macromolecules '92 - Canterbury, UK
Duration: 7 Sept 199211 Sept 1992

ASJC Scopus subject areas

  • General Engineering

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