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A ferromagnetic Co/Pt multilayer was lithographically patterned into 10-μm-wide Hall devices. The anisotropy of the fabricated devices was modified using focused ion beam (FIB). Extraordinary Hall effect (EHE) measurements reveal pronounced reduction in nucleation field of the perpendicular loops at room temperature. At low temperature of 4.2 K reduced remanent ratios in EHE loops were observed, indicating a tilting of easy magnetic axis. The canting magnetization can be explained by an increasing magnetic moment at low temperatures and a reduced anisotropy by irradiation. The aperture angles were estimated to be in the range of 20–32° at 4.2 K. The aperture angle of the easy cone of magnetization was found to increase with doses at low temperatures.