Luminescence properties of plasma-treated silicon surfaces

D. Rüter; S. Rolf; W. Bauhofer; P. J. Klar; D. Wolverson

doi:10.1016/0040-6090(94)05615-K

Luminescence properties of plasma-treated silicon surfaces

D. Rüter
, S. Rolf
, W. Bauhofer
, P. J. Klar
, D. Wolverson

Technische Universität Hamburg-Harburg
University of East Anglia

Research output: Contribution to journal › Article › peer-review

Abstract

Luminescent silicon surfaces have been prepared either by reactive spark evaporation and subsequent redeposition or by plasma-enhanced chemical vapour deposition of silanes and certain dopants on silicon. Some properties of these materials and the mechanism of the blue-green photoluminescence are discussed.

Original language	English
Pages (from-to)	305-309
Number of pages	5
Journal	Thin Solid Films
Volume	255
Issue number	1-2
DOIs	https://doi.org/10.1016/0040-6090(94)05615-K
Publication status	Published - 15 Jan 1995

Keywords

deposition
Luminescence
Plasma processing
Silicon

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/0040-6090(94)05615-K

Cite this

@article{8887687acdd14894a9e36a6f6b687580,

title = "Luminescence properties of plasma-treated silicon surfaces",

abstract = "Luminescent silicon surfaces have been prepared either by reactive spark evaporation and subsequent redeposition or by plasma-enhanced chemical vapour deposition of silanes and certain dopants on silicon. Some properties of these materials and the mechanism of the blue-green photoluminescence are discussed.",

keywords = "deposition, Luminescence, Plasma processing, Silicon",

author = "D. R{\"u}ter and S. Rolf and W. Bauhofer and Klar, \{P. J.\} and D. Wolverson",

year = "1995",

month = jan,

day = "15",

doi = "10.1016/0040-6090(94)05615-K",

language = "English",

volume = "255",

pages = "305--309",

journal = "Thin Solid Films",

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publisher = "Elsevier B.V.",

number = "1-2",

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TY - JOUR

T1 - Luminescence properties of plasma-treated silicon surfaces

AU - Rüter, D.

AU - Rolf, S.

AU - Bauhofer, W.

AU - Klar, P. J.

AU - Wolverson, D.

PY - 1995/1/15

Y1 - 1995/1/15

N2 - Luminescent silicon surfaces have been prepared either by reactive spark evaporation and subsequent redeposition or by plasma-enhanced chemical vapour deposition of silanes and certain dopants on silicon. Some properties of these materials and the mechanism of the blue-green photoluminescence are discussed.

AB - Luminescent silicon surfaces have been prepared either by reactive spark evaporation and subsequent redeposition or by plasma-enhanced chemical vapour deposition of silanes and certain dopants on silicon. Some properties of these materials and the mechanism of the blue-green photoluminescence are discussed.

KW - deposition

KW - Luminescence

KW - Plasma processing

KW - Silicon

UR - https://www.scopus.com/pages/publications/0029235883

U2 - 10.1016/0040-6090(94)05615-K

DO - 10.1016/0040-6090(94)05615-K

M3 - Article

AN - SCOPUS:0029235883

SN - 0040-6090

VL - 255

SP - 305

EP - 309

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

ER -

Luminescence properties of plasma-treated silicon surfaces

Abstract

Keywords

ASJC Scopus subject areas

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