Luminescence properties of plasma-treated silicon surfaces

D. Rüter, S. Rolf, W. Bauhofer, P. J. Klar, D. Wolverson

Research output: Contribution to journalArticle

Abstract

Luminescent silicon surfaces have been prepared either by reactive spark evaporation and subsequent redeposition or by plasma-enhanced chemical vapour deposition of silanes and certain dopants on silicon. Some properties of these materials and the mechanism of the blue-green photoluminescence are discussed.

Original languageEnglish
Pages (from-to)305-309
Number of pages5
JournalThin Solid Films
Volume255
Issue number1-2
DOIs
Publication statusPublished - 15 Jan 1995

Keywords

  • deposition
  • Luminescence
  • Plasma processing
  • Silicon

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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