Abstract
Luminescent silicon surfaces have been prepared either by reactive spark evaporation and subsequent redeposition or by plasma-enhanced chemical vapour deposition of silanes and certain dopants on silicon. Some properties of these materials and the mechanism of the blue-green photoluminescence are discussed.
Original language | English |
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Pages (from-to) | 305-309 |
Number of pages | 5 |
Journal | Thin Solid Films |
Volume | 255 |
Issue number | 1-2 |
DOIs | |
Publication status | Published - 15 Jan 1995 |
Keywords
- deposition
- Luminescence
- Plasma processing
- Silicon
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry